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Title
Japanese: 
English:Single-axis gold micro-electro-mechanical-systems capacitive accelerometer with circular proof-mass for suppressing warpage 
Author
Japanese: 奥村 雅子, 栗岡 智行, 山田 虎人, 森 達彦, 町田 克之, 陳 君怡, Chang Tso-Fu Mark, 伊藤 浩之, 三宅 美博, 曽根 正人.  
English: Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Katsuyuki Machida, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.  
Language English 
Journal/Book name
Japanese: 
English:Japanese Journal of Applied Physics 
Volume, Number, Page        
Published date Feb. 17, 2026 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
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