EUV M3D parameter prediction of curvilinear mask patterns by convolutional neural networks

Publication Information

Title

Japanese:
English:	EUV M3D parameter prediction of curvilinear mask patterns by convolutional neural networks

Author

Japanese:	Moe Sugiyama, Masayuki Shimoda, Hiroyoshi Tanabe, Atsushi Takahashi.
English:	Moe Sugiyama, Masayuki Shimoda, Hiroyoshi Tanabe, Atsushi Takahashi.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE

Volume, Number, Page

Vol. 13980 pp. 139801J-1-6

Published date

Feb. 2026

Publisher

Japanese:
English:	SPIE

Conference name

Japanese:
English:	DTCO and Computational Patterning V

Conference site

Japanese:
English:

File

DOI