It is known that if a pipe end is faced at a vibrating surface in liquid with a small gap, liquid is suctioned into the pipe. As a miniature configuration, we introduce a bending disk transducer 30 mm in diameter using a ring-shaped PZT element. The disk vibrator is worked at the fundamental resonance frequency of 19 kHz of the bending mode. To optimize the pipe geometry, we experimentally investigated the effect of the outer diameter on the pump performance. As a result, the outer/inner diameter ratio of 3:2 is optimum for the gap smaller than 20 μm. We achieved the maximum pump pressure of 14.8 kPa and the maximum flow rate of 10 ml/min. using the prototype pump.
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