Irregular Increase in Sheet Resistance of Ni Silicides at Temperature Range of Transition from NiSi to NiSi<sub>2</sub>

論文・著書情報

タイトル

和文:
英文:	Irregular Increase in Sheet Resistance of Ni Silicides at Temperature Range of Transition from NiSi to NiSi₂

著者

和文:	Kazuo Tsutsui, Ruifei Xiang, Koji Nagahiro, Takashi Shiozawa, Parhat Ahmet, Yasutoshi Okuno, Michikazu Matsumoto, Masafumi Kubota, Kuniyuki Kakushima, Hiroshi Iwai.
英文:	Kazuo Tsutsui, Ruifei Xiang, Koji Nagahiro, Takashi Shiozawa, Parhat Ahmet, Yasutoshi Okuno, Michikazu Matsumoto, Masafumi Kubota, Kuniyuki Kakushima, Hiroshi Iwai.

言語

English

掲載誌/書名

和文:
英文:	Ext. Abstract of The 6th International Workshop on Junction Technology

巻, 号, ページ

pp. 188-191

出版年月

2006年5月

出版者

和文:
英文:

会議名称

和文:
英文:	The 6th International Workshop on Junction Technology (IWJT2006)

開催地

和文:
英文:	Shanghai, China