We measured the dissociation degree of oxygen molecule in a microwave discharge oxygen plasma by optical emission spectroscopy measurement based on actinometry method. We generated an oxygen plasma in a cylindrical quartz tube (26 mm i.d.) with a discharge pressure 0.5 - 3.0 Torr. The microwave frequency was 2.45 GHz and the output power was set at 600 W. We monitored the oxygen atom density by actinometry using the 844.6 nm line of oxygen atom and the 811.5 nm line of argon. The dissociation degree was estimated at about a few percent. To discuss the validity of the measured dissociation degree, we calculated the population balance equations of the active spices and EEDF (electron energy distribution function) self-consistently. The theoretical calculations were in agreement with the experimental results. We discussed the validity of the dissociation degree of oxygen molecule and some reactions, which play an important role in the microwave discharge oxygen plasma.
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