We made an experimental study on Ti oxidation by microwave discharge oxygen plasma. We treated titanium sheets with 15 × 15 × 2 mm3 in their size, and irradiated them by microwave discharge oxygen plasma with its discharge pressure several Torr. We applied XRD analysis to detect TiO2 formation after the plasma treatment, where we found only rutile pattern under the present discharge condition. To elucidate the relationship between the oxidation rate and the plasma parameters, we measured plasma parameters by probe and OES method. Measured plasma parameters were the following; electron temperature 1.8 - 5.1 eV, electron density 1.0 × 1011 - 1.0 × 1012 cm-3, vibrational temperature determined by OH radical transition 0.21 - 0.25 eV, rotational temperature determined by OH radical 0.14 - 0.15 eV, and the Ti-substrate temperature during the plasma processing 550 - 1100 K, all of which were found to be less significant to the plasma oxidation of titanium. We examined the density of oxygen atoms by actinometry measurement to be (1 - 6) × 1012 cm-3. The titanium oxidation rate was monotonically increased with the number density of oxygen atoms, whereas other plasma parameters had little correlation with the oxidation rate. The density of atomic oxygen has a significant role in plasma oxidation of titanium.
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