To achieve a hydraulic power system, it is important to control tribology because water has a lack of lubricity. Therefore, coated surface is necessary under water lubrication. Diamond-like-carbon (DLC)-coating is known as a useful material because of its high hardness and low friction, therefore it can be used as a coating durable for the water lubrication. Deposition methods of DLC-coating are developed invariousways. Particles called “droplets” are observed on the surface of DLC-coating depends on deposition methods and it can affect friction and wear properties. In this study, DLC-coating was prepared using amulti-cathode unbalanced magnetron sputtering (UBMS) system. The surface was polished with diamond slurry solution and aero lap to remove droplets. DLC-coatings were evaluated by tribo-tests before and after polishing. It is considered that some surface modification occurred. Moreover, the results of tribotestsshowthat friction coefficients became lower and more stable than before polishing. Although partial delamination was observed after tribo-tests without polishing, no appreciable wear was observed afterpolishing.
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