We carried out quantitative mapping of conductivity sigma for the SrTiO3-LaAlO3-LaTiO3 (STO-LAO-LTO) ternary composition-spread thin film by using the scanning microwave microscope (S mu M). The sigma was evaluated from the shifts in Q-value with reference to the standard Ti1-xNxO2 composition-spread thin film. Results for the ternary system showed excellent agreement with the literature values of sigma in the binary STO-LAO and STO-LTO systems, confirming the accuracy of the present analysis method. An electric phase diagram was proposed for the ternary system based on the quantitative film-conductivity data. Metallic conduction in the ternary system was observed in a wide area close to the STO-LTO side, which gave way to the hopping conduction if LAO component exceeded ca. 35%.
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