Fabrication of ternary phase composition-spread thin film libraries and their high-throughput characterization: Ti1-x-yZrxHfyO2 for bandgap engineering
Ternary phase composition-spread thin film libraries, TiO2-ZrO2-HfO2, were synthesized by using a combinatorial pulsed laser deposition system. The composition, crystalline structure, and optical transmission properties were characterized in a high-throughput way. TiO2 doped with Zr and Hf was found to exhibit a wider bandgap than pure TiO2; hence, these compounds can be used as wide gap semiconductors for heteroepitaxial spintronics devices, based on a ferromagnetic semiconductor, Co-doped TiO2.
各種検索
サポート
ヘルプ