Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2) Radicals and Formation of Hydrogenated Amorphous Carbon Films

論文・著書情報

タイトル

和文:	Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2) Radicals and Formation of Hydrogenated Amorphous Carbon Films
英文:	Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2) Radicals and Formation of Hydrogenated Amorphous Carbon Films

著者

和文:	Haruhiko Ito, Katsuaki Koshimura, Saori Onitsuka, Kohtaro Okada, Tsuneo Suzuki, Hiroki Akasaka, Hidetoshi Saitoh.
英文:	Haruhiko Ito, Katsuaki Koshimura, Saori Onitsuka, Kohtaro Okada, Tsuneo Suzuki, Hiroki Akasaka, Hidetoshi Saitoh.

言語

English

掲載誌/書名

和文:	Plasma Chem Plasma Process
英文:	Plasma Chem Plasma Process

巻, 号, ページ

Vol. 32 pp. 231–248

出版年月

2012年3月1日

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