Collaborative Conference on Materials Research (CCMR 2014)
開催地
和文:
ソウル
英文:
Seoul
アブストラクト
We have investigated waveguide-type magneto-optical isolators based on silicon photonic waveguides with an upper cladding layer of magneto-optic garnet. It is difficult to integrate a single-crystalline garnet having a large magneto-optical effect on silicon or any other waveguide platforms. Our approach is to use a direct bonding technology which realizes direct contact between two different materials without any adhesive [1]. Any interlayer between core and upper cladding reduces the nonreciprocal effect. Therefore, our approach enables more efficient nonreciprocal effect than any other approach using adhesive bonding [2] or deposition with buffer layer [3]. Our direct bonding is carried out with plasma activation followed by pressing and annealing processes in a vacuum chamber.
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