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タイトル
和文: 
英文:Statistical Physics of Electron Temperature of Low-Pressure Discharge Nitrogen Plasma with Non-Maxwellian EEDF 
著者
和文: 赤塚洋, 田中昌徳.  
英文: Hiroshi Akatsuka, Yoshinori Tanaka.  
言語 English 
掲載誌/書名
和文: 
英文:Bull. Am. Phys. Soc. 
巻, 号, ページ Vol. 61    No. 9    pp. 72-73
出版年月 2016年10月10日 
出版者
和文: 
英文:The American Physical Society 
会議名称
和文: 
英文:69th Annual Gaseous Electronics Conference (GEC2016) 
開催地
和文:ボーフム 
英文:Bochum 
公式リンク http://meetings.aps.org/Meeting/GEC16/Session/MW6.45
 
アブストラクト We reconsider electron temperature of non-equilibrium plasmas on the basis of thermodynamics and statistical physics. Following our previous study on the oxygen plasma in GEC 2015, we discuss the common issue for the nitrogen plasma. First, we solve the Boltzmann equation to obtain the electron energy distribution function (EEDF) F(ϵ) of the nitrogen plasma as a function of the reduced electric field E/N. We also simultaneously solve the chemical kinetic equations of some essential excite species of nitrogen molecules and atoms, including vibrational distribution function (VDF). Next, we calculate the electron mean energy as U=⟨ϵ⟩=∫^∞_0 ϵF(ϵ)dϵ and entropy S=−k∫^∞_0 F(ϵ)ln[F(ϵ)]dϵ for each value of E/N. Then, we can obtain the electron temperature as T_state=[∂S/∂U]^(-1). After that, we discuss the difference between T_state and the kinetic temperature T_kine≡(2/3)⟨ϵ⟩, as well as the temperature given as a slope of the calculated EEDF for each value of E/N. We found Tstate is close to the slope at ϵ∼4 eV in the EEPF.

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