This work is focused on diagnostics of electron temperature (1.0 eV–3.8 eV) and electron density (1.0 × 109 cm−3–5.0 × 1012 cm−3) of lowpressure (133 Pa) discharge argon plasma by optical emission spectroscopic (OES) measurement. The diagnostic method using multi-emission lines was analyzed. First, the excitation-kinetic models were obtained by extracting dominant kinetic processes based on the collisional-radiative model. Then, the diagnostic equations for wide range of electron temperature and density were proposed to describe the approximate excitation
kinetic balance of several excited levels. 15 optical emission lines (wavelength range: 340.7 nm–912.3 nm) were selected for OES measurement. RMS of the theoretical relative error was found to be 5.96% for electron temperature, while 32.6% for electron density. The diagnostics of 2.45 GHz microwave plasma was demonstrated by the proposed method and by the probe method. The electron density results by the proposed method were in good agreement with the probe method.
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