To examine the possibility of OES measurement of electron etemperature and density of low-pressure discharge Ar-O2 mixture plasmas, the effect of quenching of argon metastable states by collisions with oxygen molecules is discussed using the collisional-radiative model of argon plasma. It was confirmed that not only the metastable level but also the density of other excited states decreased as the O2 mixing rate increased. However, it was found that the effect differs depending on the level.
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