The aim of the study was to design and build a multi-gas temperature-controllable plasma jet that can control the gas temperature of plasmas with various gas species, and evaluated its temperature control performance. In this device, a fluid at an arbitrary controlled temperature is circulated through the plasma jet body. The gas exchanges heat with the plasma jet body to control the plasma temperature. Based on this concept, a complex-shaped plasma jet with two channels in the plasma jet body, a temperature control fluid (TCF) channel, and a gas channel was designed. The temperature control performance of nitrogen gas was evaluated using computational fluid dynamics analysis, which found that the gas temperature changed proportionally to the TCF temperature. The designed plasma jet body was fabricated using metal 3D-printer technology. Using the fabricated plasma jet body, stable plasmas of argon, oxygen, carbon dioxide, and nitrogen were generated. By varying the plasma jet body temperature from −30 °C to 90 °C, the gas temperature was successfully controlled linearly in the range of 29–85 °C for all plasma gas species. This is expected to further expand the range of applications of atmospheric low temperature plasma and to improve the plasma treatment effect.
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