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タイトル
和文:2原子分子気体放電プラズマの発光分光計測と原子分子過程 
英文:Optical Emission Spectroscopy (OES) Measurement and Atomic/Molecular Processes of Diatomic Molecular Gas-Discharge Plasma 
著者
和文: 赤塚 洋.  
英文: Hiroshi AKATSUKA.  
言語 Japanese 
掲載誌/書名
和文:シリコンテクノロジー 
英文: 
巻, 号, ページ     No. 234   
出版年月 2022年3月15日 
出版者
和文:公益社団法人 応用物理学会 
英文:Japan Society of Applied Physics 
会議名称
和文:応用物理学会シリコンテクノロジー分科会 第234回 研究集会 
英文: 
開催地
和文: 
英文: 
公式リンク https://annex.jsap.or.jp/silicon/activity/studyGroup/234
 
アブストラクト A theoretical method to calculate optical emission spectrum emitted from several typical excited diatomic molecular species in plasmas is described based on molecular spectroscopic data, which makes possible to determine the vibrational and rotational temperatures of the molecular species in the plasma. The physical meaning of the rotational temperature is explained as an approximate value of the gas temperatures in plasmas. By the non-equilibrium characteristics in the vibrational or rotational structures, some examples are introduced to understand the excitation kinetics to generate reactive radicals or atoms in the plasmas. The most fundamental method to describe the excitation kinetics of some excited species including atoms is also introduced with the Boltzmann analysis of electrons in the nitrogen and oxygen plasmas.

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