Diagnostics of Electron Density and Temperature of Atmospheric Pressure Helium Plasma with Revise Collisional-Radiative Model Includes Atomic Collision Processes
The helium collisional-radiative model (CR model) is revised. Part of the optically allowed electron collision excitation and deexcitation processes and the electron collision ionization processes are recalculated from the cross-sections. The atomic impact processes, which include excitation, deexcitation, ionization, and three-body recombination are integrated into the model as well. This expands the valid pressure of the helium CR model to atmospheric pressure. An algorithm that possesses the function of diagnosing electron density and temperature of helium plasma at atmospheric pressure coupled with the revised CR model is developed. It uses the number density of excited levels (31S, 33S, 31P, 33P, 31D, 33D, 41D, and 43D) which can be obtained by optical emission spectroscopy (OES) measurements in visible wavelength range as input to fit the number density of two metastable states (21S and 23S), electron density, and electron temperature. The algorithm was verified theoretically and experimentally. The results showed the theoretical error of the algorithm was small enough, and the diagnosed electron density and temperature in low-pressure microwave induced helium plasma were in good agreement with the results of probe method.
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