Diagnosis of argon inductively coupled plasma by optical emission spectroscopic measurement with compensation of spectral reflectance on chamber inner wall
A simple method to measure the spectral reflectance of the chamber inner wall was proposed for optical emission spectroscopic (OES) measurement of inductively coupled plasma. By applying the spectral radiance compensation based on the measured spectral reflectance, the electron temperature and density obtained by OES measurement were in trend agreeing with probe measurement results.
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