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タイトル
和文: 
英文:Estimation of atmospheric-pressure non-equilibrium Ar plasma EEDF using optical emission spectroscopy and linear combination of generalized EEDF 
著者
和文: 菊地航行, 榎本純, 山下航平, 山下雄也, 根津篤, 赤塚洋.  
英文: Wataru Kikuchi, Jun Enomoto, Kohei Yamashita, Yuya Yamashita, Atsushi Nezu, Hiroshi Akatsuka.  
言語 English 
掲載誌/書名
和文: 
英文:Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25) 
巻, 号, ページ        
出版年月 2023年5月21日 
出版者
和文: 
英文:International Organizing Committee of ISPC25 
会議名称
和文: 
英文:25th International Symposium on Plasma Chemistry (ISPC25) 
開催地
和文:京都 
英文:Kyoto 
公式リンク https://www.ispc25.com/index.html
 
アブストラクト Using optical emission spectroscopy (OES) measurement and global optimal search methods, the electron energy distribution function (EEDF), electron temperature T_e, and density N_e of dielectric barrier discharge (DBD) atmospheric-pressure non-equilibrium plasma (APNEP) are measured. Continuum emission due to bremsstrahlung is observed to the analysis with the spectrometric system in the visible wavelength range calibrated absolutely. Experimental results are compared with the theoretical spectra determined by linear combination of generalized EEDF in entire measurable range. The methodology to find the best theoretical fitting to obtain the plasma parameters is discussed with global optimization mathematics. It is found that T_e ~ 1.9 – 1.5 [eV] and 0.33 – 0.52 [eV], and the general EEDF parameter γ ~ 11 – 5 and 1 – 2.75 in high- and low- energy regions, respectively, as discharge voltage increases. N_e is confirmed to be approximately (0.63 - 5.3) × 10^{13}[cm^{-3}].

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