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タイトル
和文:Bottom Contact 100 nm Channel‐Length α‐In2Se3 In‐Plane Ferroelectric Memory 
英文:Bottom Contact 100 nm Channel‐Length α‐In2Se3 In‐Plane Ferroelectric Memory 
著者
和文: Shurong Miao, Ryosuke Nitta, 伊澤誠一郎, Yutaka Majima.  
英文: Shurong Miao, Ryosuke Nitta, Seiichiro Izawa, Yutaka Majima.  
言語 English 
掲載誌/書名
和文:Advanced Science 
英文:Advanced Science 
巻, 号, ページ        
出版年月 2023年10月 
出版者
和文: 
英文: 
会議名称
和文: 
英文: 
開催地
和文: 
英文: 
公式リンク http://dx.doi.org/10.1002/advs.202303032
 
DOI https://doi.org/10.1002/advs.202303032
アブストラクト <jats:title>Abstract</jats:title><jats:p>Owing to the emerging trend of non‐volatile memory and data‐centric computing, the demand for more functional materials and efficient device architecture at the nanoscale is becoming stringent. To date, 2D ferroelectrics are cultivated as channel materials in field‐effect transistors for their retentive and switchable dipoles and flexibility to be compacted into diverse structures and integration for intensive production. This study demonstrates the in‐plane (IP) ferroelectric memory effect of a 100 nm channel‐length 2D ferroelectric semiconductor α‐In<jats:sub>2</jats:sub>Se<jats:sub>3</jats:sub> stamped onto nanogap electrodes on Si/SiO<jats:sub>2</jats:sub> under a lateral electric field. As α‐In<jats:sub>2</jats:sub>Se<jats:sub>3</jats:sub> forms the bottom contact of the nanogap electrodes, a large memory window of 13 V at drain voltage between ±6.5 V and the on/off ratio reaching 10<jats:sup>3</jats:sup> can be explained by controlled IP polarization. Furthermore, the memory effect is modulated by the bottom gate voltage of the Si substrate due to the intercorrelation between IP and out‐of‐plane (OOP) polarization. The non‐volatile memory characteristics including stable retention lasting 17 h, and endurance over 1200 cycles suggest a wide range of memory applications utilizing the lateral bottom contact structure.</jats:p>

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