In non-equilibrium plasmas, the electron energy distribution function (EEDF) and excited state number density distribu- tion generally do not follow the Boltzmann distribution. Even for such non-equilibrium states, it may be possible to define the temperature T as 1/T = ∂S/∂U using the entropy S and internal energy U in statistical mechanics. In this calculation, however, the principle of entropy maximization should be applied. In the case of non-equilibrium, non-extensive Tsallis entropy is one of the candidates rather than Gibbs entropy. This study focuses on the excited-state density distribution in hydrogen plasma and the EEDF in low-temperature weakly-ionized plasma, by various temperatures newly defined using the non-extensive entropy.
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