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タイトル
和文: 
英文:Dependence of Electron Temperature and Density on the Device Type for Atmospheric-Pressure Non-Equilibrium Argon Plasma 
著者
和文: 榎本純, 菊地航行, 根津篤, 赤塚洋.  
英文: Jun Enomoto, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka.  
言語 English 
掲載誌/書名
和文: 
英文:Proc. DPS2025 
巻, 号, ページ        
出版年月 2025年11月13日 
出版者
和文:応用物理学会プラズマエレクトロニクス分科会 
英文:Division of Plasma Electronics, Japan Society of Applied Physics 
会議名称
和文: 
英文:The 46th International Symposium on Dry Process (DPS2025) 
開催地
和文:松山 
英文:Matsuyama 
公式リンク https://www.dry-process.org/2025/poster_program.html
 
アブストラクト Spectra of Ar plasma generated by an atmospheric-pressure plasma jet and an enclosed DBD device were compared. A two-temperature electron energy distribution function (EEDF) is proposed for non-equilibrium argon atmospheric-pressure plasma. Its continuum emission spectrum, dominated by electron-neutral bremsstrahlung radiation, was analyzed to determine the electron temperature (T_e) and density (N_e) by optical emission spectroscopy (OES) measurement. The behavior near the jet electrode showed a similar trend to that of the conventional DBD device when its voltage was altered. Unlike the DBD device, the region outside of the jet's glass tube exhibited a spectrum that could be characterized by a single temperature.

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