Spatially resolved measurement of inductively coupled plasma (ICP) and capacitively coupled plasma (CCP)
oxygen discharges were performed using tomographic optical emission spectroscopy (OES). Reconstructed
O 777.34 nm and 844.65 nm excited-state number densities, and a self-consistent actinometry–collisional
radiative model (CRM) method provided the spatial distributions of dissociation degree, electron temperature
T e and electron density n e. The ICP showed center-high excitation, center-high dissociation, center-high
electron temperature, and center-low electron density. Meanwhile, the CCP exhibited lower excitation,
asymmetric dissociation, center-high electron temperature, and high electron density near the periphery.
These results reveal differences in power deposition between oxygen ICP and CCP.
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