"山口 昇,Li Shasha,宮島 晋介","[25a-P05-4] スパッタおよびイオン注入を用いた高品質(τeff > 10 ms) TOPCon構造の作製","2024年第71回応用物理学会春季学術講演会",,,,,,2024,Mar. "Noboru Yamaguchi,Ralph M?ller,Christian Reichel b,Jan Benick,Shinsuke Miyajima","Plasma immersion ion implantation for tunnel oxide passivated contact in silicon solar cell",,"Solar Energy Materials and Solar Cells",,"Volume 268",," 112730",2024,Feb. "Noboru Yamaguchi,Ralph M?ller,Christian Reichel,Jan Benick,Shinsuke Miyajima","(Area5 5TuO7-5) Application of plasma immersion ion implantation technics to TOPCon solar cells","The 34th International Photovoltaic Science and Engineering Conference (PVSEC-34)",,,,,,2023,Nov. "Noboru Yamaguchi,Shasha Li,Shinsuke Miyajima","Characterization of tunnel oxide passivated contact fabricated by sputtering and ion implantation technique",,"Japanese Journal of Applied Physics",," 62",," SK1024",2023,Apr. "Noboru Yamaguchi,Shinsuke Miyajima","Evaluation of passivation layer for TOPCon formed by sputtering and ion implantation (WeO-31g-07])","33rd International Photovoltaic Science and Engineering Conference (PVSEC-33)",,,,,,2022,Nov. "山口 昇,宮島 晋介","スパッタ法およびイオン注入法にて形成したTOPCon構造の評価(20p-C101-6)","第83回 応用物理学会秋季学術講演会",,,,,,2022,Sept.