"Haruko Akutsu,Reiko Saito,Jun Asakawa,Kei Kiyokawa,Masato Morita,Tetsuo Sakamoto,Masaaki Fujii","Distribution of trace impurities in micro volumes and analysis of concentration using laser sputtered neutral mass spectrometry",,"Journal of Vacuum Science & Technology B",,"Vol. 39","Issue 6",,2021,Dec.
"圷晴子","半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発",,,,,,,2021,Sept.
"圷晴子","半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発",,,,,,,2021,Sept.
"圷晴子","半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発",,,,,,,2021,Sept.
"圷晴子","半導体デバイス中不純物分析に対する 新規レーザーイオン化分析の開発",,,,,,,2021,Sept.
"Reiko Saito,Haruko Akutsu,Jun Asakawa,Yue Zhao,Kei Kiyokawa,Masato Morita,Tetsuo Sakamoto,Masaaki Fujii","Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers",,"J. Vac. Sci. Technol., B",,"Vol. 38","No. 3","pp. 034011-1-5",2020,Apr.
"Reiko Saito,* Haruko Akutsu,Jun Asakawa,Shiro Takeno,Kei Kiyokawa,Satoru Nagashima,Takeharu Ishikawa,Takahiro Kashiwagi,Akio Takano,Tetsuo Sakamoto,Masaaki Fujii","Matrix and element dependences of useful yield in Si and SiO2 matrices using laser-ionization sputtered neutral mass spectrometry",,"Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena",,"  36","  3","  03F128",2018,May