"Masako Okumura,Tomoyuki Kurioka,Torauto Yamada,Tatsuhiko Mori,Tso-Fu Mark Chang,Yoshihiro Miyake,Hiroyuki Ito,Masato Sone,Katsuyuki Machida","Warpage Suppression and Device Characteristics of Gold Single-Axis Circular Proof-mass MEMS Capacitive Accelerometer Authors Information","International Microprocesses and Nanotechnology Conference (MNC 2025)",,,,,,2025,Nov.
"高畑 寿志,栗岡 智行,山田 虎人,町田 克之,Tso-Fu Mark Chang,三宅 美博,伊藤 浩之,曽根 正人","Ti/Auで形成した九十九折ばねにおけるTi膜のばね形状への影響に関する検討","第17回集積化MEMSシンポジウム",,,,,,2025,Nov.
"奥村 雅子,栗岡 智行,森 達彦,山田 虎人,向出 隼人,Chun Yi-Chen,Tso-Fu Mark Chang,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","静電容量型MEMS加速度センサにおける金錘の形状による反り抑制の検討","第17回集積化MEMSシンポジウム",,,,,,2025,Oct.
"Devi Srujana Tenneti,Chihaya Mukaide,Kisuke Miyado,Torauto Yamada,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Design and Evaluation of a Dual Detection Range Single-Axis MEMS Capacitive Accelerometer with Gold Proof-Mass Structure for Suppressed Warpage",,"Japanese Journal of Applied Physics",,"Vol. 64",,"p. 04SP20",2025,Apr.
"Kisuke Miyado,Torauto Yamada,Devi Srujana Tenneti,Chihaya Mukaide,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept.
"Devi Srujana Tenneti,Kisuke Miyado,Chihaya Mukaide,Torauto Yamada,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept.