"Kisuke Miyado,Torauto Yamada,Devi Srujana Tenneti,Chihaya Mukaide,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept.
"Devi Srujana Tenneti,Kisuke Miyado,Chihaya Mukaide,Torauto Yamada,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept.