"Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Kazuki Shimatani,Hinata Hanyu,Ayaki Sakurai,Yuya Yamashita,Atsushi Nezu,Hiroshi Akatsuka","Effects of Bias Power on EEPFs near the Substrate in Argon ICP Measured by a Langmuir Probe","The 46th International Symposium on Dry Process (DPS2025)","Proc. DPS2025","Division of Plasma Electronics, Japan Society of Applied Physics",,,,2025,Nov. "Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Wataru Kikuchi,Kazuki Shimatani,Hinata Hanyu,Wentao He,Ayaki Sakurai,Yuya Yamashita,Atsushi Nezu,Hiroshi Akatsuka","Spatial distribution of electron temperature and density in argon RF-biased ICP with non-quasi-neutrality effects","The 78th Annual Gaseous Electronics Conference (GEC2025)","Bull. American Phys. Soc.","Americal Physical Society",,,,2025,Oct. "Kazuki Shimatani,Tetsuji Kiyota,Kenta Doi,Yuya Yamashita,Wataru Kikuchi,Kenta Ishi,Yuchen Ye,Ayaki Sakurai,Atsushi Nezu,Hiroshi Akatsuka","Spatial distribution measurement of electron temperature and density of inductively coupled nitrogen plasma by tomographic optical emission spectroscopy","The 78th Annual Gaseous Electronics Conference (GEC2025)","Bull. American Phys. Soc.",,,,,2025,Oct. "He Wentao,Tetsuji Kiyota,Kenta Doi,Yuya Yamashita,Wataru Kikuchi,Shuhei Watanabe,Ayaki Sakurai,Yuchen Ye,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis","The 78th Annual Gaseous Electronics Conference (GEC2025)","Bull. American Phys. Soc.","Americal Physical Society",,,,2025,Oct. "Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Kazuki Shimatani,Ayaki Sakurai,Wentao He,Yuya Yamashita,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Exploring Multiple Solutions of Electron Temperature and Density in the Argon Collisional-Radiative Model Using Monte Carlo Simulations","ISPlasma2025/IC-PLANTS2025","Proceedings of ISPlasma2025/IC-PLANTS2025","Organizing Committee of ISPlasma2025/IC-PLANTS2025",,," 05P-24",2025,Mar. "櫻井 彩貴,山下 雄也,YE YUCHEN,島谷 和希,福本 晃己,根津 篤,赤塚 洋","ICP放電窒素プラズマへのアルゴン混入による非平衡性の変化","令和 7 年電気学会全国大会","令和 7 年電気学会全国大会 講演論文集","一般社団法人 電気学会",,,"p. 62",2025,Mar. "山下 雄也,土居 謙太,清田 哲司,叶 宇晨,菊地 航行,島谷 和希,何 文涛,羽生 陽向,櫻井 彩貴,根津 篤,赤塚 洋","トモグラフィック発光分光計測とAr衝突輻射モデルにもとづくCF4/O2/Arプラズマの診断--他原子種の励起状態分布が診断結果に及ぼす影響","2024年合同素過程研究会 「プラズマの分光診断と原子分子素過程の研究フロンティア」 「原子分子データ応用フォーラムセミナー」","「プラズマの分光診断と原子分子素過程の研究フロンティア」 「原子分子データ応用フォーラムセミナー」要旨集","特定非営利活動法人 原子分子データ応用フォーラム",,,,2024,Dec. "Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Ayaki Sakurai,Yuya Yamashita,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Detection of Two-Temperature Distributions of Argon ICP Using Collisional-Radiative Model and Tomographic Optical Emission Spectroscopy","2024 nifs Atomic Process Workshop","「プラズマの分光診断と原子分子素過程の研究フロンティア」「原子分子データ応用フォーラムセミナー」合同研究会(2024/12)要旨集","特定非営利活動法人 原子分子データ応用フォーラム",,,,2024,Dec. "山下 雄也,土居 謙太,清田哲司,叶宇晨,島谷和希,何文涛,羽生陽向,菊地航行,櫻井彩貴,根津篤,赤塚洋","トモグラフィック発光分光計測とアルゴン衝突輻射モデルにもとづくCF4/O2/Arプラズマの電子温度・電子密度・EEDFの位置分布診断","第85回応用物理学会秋季学術講演会","第85回応用物理学会秋季学術講演会 講演要旨集","公益社団法人 応用物理学会",,,,2024,Sept. "Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Wataru Kikuchi,Yuchen Ye,Atsushi Nezu,Hiroshi Akatsuka","Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement","ESCAMPIG (Europhysics Conference on Atomic and Molecular Physics of Ionized Gases) 2024","Proceedings of ESCAMPIG2024","Department of Plasma Physics and Technology of Masaryk University (MUNI)",,,,2024,July "山下 雄也,土居 謙太,清田 哲司,渡邊 修平,島谷 和希,菊地 航行,根津 篤,赤塚 洋","トモグラフィック発光分光計測によるフッ素原子コロナモデルに基づくCF4/O2プラズマの電子温度診断","第71回応用物理学会春季学術講演会","第71回応用物理学会春季学術講演会 講演予稿集","公益社団法人 応用物理学会",,,"p. 07-009",2024,Mar. "Kenta Ishi,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Kazuma Yoneda,Shuhei Watanabe,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma","ISPlasma2024/IC-PLANTS2024/APSPT-13","Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13","Organizing Committee of ISPlasma2024/IC-PLANTS2024/APSPT-13",,,,2024,Mar. "石健太,土居謙太,清田哲司,山下雄也,米田和真,渡邊修平,島谷和希,根津篤,赤塚洋","誘導結合窒素プラズマ中の励起状態数密度と電子温度の関係性に関する議論","第41回プラズマプロセシング研究会","第41回 プラズマプロセシング研究会 プロシーディングス","応用物理学会プラズマエレクトロニクス分科会",,,"pp. 30-31",2024,Jan. "Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Ayaki Sakurai,Yuya Yamashita,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements","The 41st annual meeting of The Japan Society of Plasma Science and Nuclear Fusion Research","Extended Abstracts of the 41st Annual Meeting of JSPF","The Japan Society of Plasma Science and Nuclear Fusion Research",,,,2024,