"Kiichi Tachi,N. Vulliet,S. Barraud,B. Guillaumot,V. Maffini-Alvaro,C. Vizioz,C. Arvet,Y. Campidelli,P. Gautier,J.M. Hartmann,T. Skotnicki,S. Cristoloveanu,HIROSHI IWAI","3D Source/Drain Doping Optimization in Multi-Channel MOSFET","ESSDERC 2010, 40th European Solid-State Device Research Conference",,,,,,2010,Sept.