"Yasuhisa Sato,Rinshi Sugino,Masaki Okuno,Nobuo Kikuchi,Junichi Teramae,Akinao Ogawa,Shinpei Hijiya,Takashi Ito","Photo-Excited Dry Cleaning for ULSI","Proc. of VLSI Symp. on Tech. System and Application","Proc. of VLSI Symp. on Tech. System and Application",,,,,1991,