"Yoshihiro Sugita,Naoki Awaji,Satoshi Ohkubo,Satoru Watanabe,Satoshi Komiya,Takashi Ito","X Ray Refractometry and Infrared Analysis of Native Oxides on Si(100) Formed in Chemical Treatment","Ext. Abst. of 1995 Int. Conf. on SSDM","Ext. Abst. of 1995 Int. Conf. on SSDM",,,,"pp. 836-837",1995,