"Zeyu Gu,Jhen-Yang Wu,Yiming Jiang,Tomoyuki Kurioka,Chun-Yi Chen,Hwai-En Lin,Xun Luo,Daisuke Yamane,Masato Sone,Tso-Fu Mark Chang","Influence of Pulsed Reverse Electrodeposition on Mechanical Properties of Ni-W Alloys",,"Electrochem","MDPI","Vol. 5",,"pp. 287-297",2024,July
"Takuto Nakanishi,Akihito Kato,Yuji Wada,Ryo Nakashima,Chenxu Zhao,Cheng-Yao Lo,Kentaro Nakamura,Heeyoung Lee,Yosuke Mizuno,Daisuke Yamane","Multimode interference-based strain sensing using micro dry-etched perfluorinated polymer optical fibers",,"Japanese Journal of Applied Physics",,"vol. 63","no. 2","  028003",2024,Jan.
"Tso-Fu Mark Chang,Tomoyuki Kurioka,Chun-Yi Chen,Xun Luo,Daisuke Yamane,Hwai En Lin,Masato Sone","Design of Electrodeposited Materials for MEMS Sensors","The 2023 International Conference on Green Electrochemical Technologies & The 2023 Annual Meeting of Electrochemical Society of Taiwan",,,,,,2023,Oct.
"Yiming Jiang,Tomoyuki Kurioka,Chun-Yi Chen,Xun Luo,Daisuke Yamane,Masato Sone,Tso-Fu Mark Chang","Electrodeposition of Nickel-Cobalt Alloys with additives and their Mechanical Properties","74th Annual Meeting  of the International Society of Electrochemistry",,,,,,2023,Sept.
"Yiming Jiang,Chun-Yi Chen,Tomoyuki Kurioka,Xun Luo,Daisuke Yamane,Masato Sone,Tso-Fu Mark Chang","Effects of Bromide Ions in Anomalous Codeposition of Ni-Co Alloys with a Sulfamate Based Electrolyte",,"Journal of The Electrochemical Society",,"Vol. 170",,"p. 072507",2023,July
"Yiming Jiang,Chun-Yi Chen,Tomoyuki Kurioka,Xun Luo,Daisuke Yamane,Masanori Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone,Tso-Fu Mark Chang","Specimen Size Effect on the Strength of Nickel-Boron Alloys",,"Materials Letters",,"Vol. 349",,"p. 134742",2023,June
"Yiming Jiang,Chun-Yi Chen,Tomoyuki Kurioka,Xun Luo,Daisuke Yamane,Masanori  Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone,Tso-Fu Mark Chang","Electrodeposition of Ni-B Alloy Film: Effect of Current Density and Heat Treatment on Micro-Mechanical Property",,"Journal of The Electrochemical Society","The Electrochemical Society","Vol. 169","No. 11","pp. 112504",2022,Nov.
"Yiming Jiang,Chun-Yi Chen,Xun Luo,Daisuke Yamane,Masanori Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone,Tso-Fu Mark Chang","Micro-compression and micro-hardness of electrodeposited Nickel-Cobalt alloys","3-day International Conference on Materials Science",,,,,,2022,Oct.
"Yiming Jiang,Chun-Yi Chen,Tomoyuki Kurioka,Daisuke Yamane,Masanori Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone,Tso-Fu Mark Chang","Ultra-High Mechanical Strength and Thermal Stability of Electrodeposited Ni-B Alloys toward MEMS Micro-Components","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept.
"Masato Sone,Hitomi Watanabe,Kyotaro Nitta,Hideaki Nakajima,Tomoyuki Kurioka,Chun-Yi Chen,Parthojit Chakraborty,Daisuke Yamane,Hiroyuki Ito,Katsuyuki. Machida,Yoshihiro Miyake,Tso-Fu Mark Chang","A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept.
"Yiming Jiang,Chun-Yi Chen,Tomoyuki Kurioka,Daisuke Yamane,Masanori Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone,Tso-Fu Mark Chang","Micro-scale Mechanical Characterustic of Electrodeposited Ni-B Alloys Components Toward Design of MEMS Devices","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept.
"Tomoyuki Kurioka,Koichiro Tachibana,Kyotaro Nitta,Chun-Yi Chen,Tso-Fu Mark Chang,Parthojit Chakraborty,Daisuke Yamane,Hiroyuki Ito,Katsuyuki. Machida,Yoshihiro Miyake,Masato Sone","Evaluation of Streucture Stability of  Au-Based Micro Cantilevers Evidenced by Long-Term Vibration Tests","NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS",,,,,,2022,Sept.
"Yiming Jiang,Chun-Yi Chen,Xun Luo,Daisuke Yamane,Masanori  Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone,Tso-Fu Mark Chang","Electrodeposition and Micro-Mechanical Property Characterization of  Nickel-Cobalt Alloys toward Design of MEMS Components",,"Electrochem","MDPI","Vol. 3",,"pp. 198-210",2022,Apr.
"Yiming Jiang,Chun-Yi Chen,Xun Luo,Daisuke Yamane,Masato Sone,Tso-Fu Mark Chang","High Strength Electrodeposited Ni-B alloys and Their Thermal Stability","2022年応?物理学会春季講演会",,,,,,2022,Mar.
"?村 太郎,Chun-Yi Chen,Tso-Fu Chang,?根 ?輔,伊藤浩之,町?克之,三宅美博,曽根正?","?めっき材料における機械的特性の電流密度依存性","2022年応?物理学会春季講演会",,,,,,2022,Mar.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression",,"Surface & Coatings Technology","Elsevier","Vol. 436",,"p. 128315",2022,Feb.
"Yiming Jiang,Chun-Yi Chen,Tso-Fu Mark Chang,Xun Luo,Daisuke Yamane,Masanori Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone","Electrodeposition of Ni-Co Alloys from Sulfamate Bath and the Micro-Mechanical Property","The 2021 International Chemical Congress of Pacific Basin Societies (Pacifichem 2021)",,,,,,2021,Dec.
"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electro-co-deposition of Au-TiO2 Composites with Improved Mechanical Property toward Miniaturized Electronics","The 2021 International Chemical Congress of Pacific Basin Societies (Pacifichem 2021)",,,,,,2021,Dec.
"Yiming Jiang,Chun-Yi Chen,Xun Luo,Daisuke Yamane,Masanori Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone,Tso-Fu Mark Chang","Electrodeposition of Nickel-Cobalt Alloy Films and their Micro-Mechanical Property","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Characteristic of Electrodeposited Gold Evaluated from Cyanide Bath","TACT2021 International Thin Films Conference","TACT2021 International Thin Films Conference",,,,,2021,Nov.
"Kazuya Fujita,Kosuke Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"藤田 一矢,鈴木 康介,陳 君怡,Chang Tso-Fu Mark,山根 大輔,伊藤 浩之,町田 克之,益 一哉,曽根 正人","金単結晶微小カンチレバーの機械的特性とサンプル形状効果","第82回応用物理学会秋季学術講演会","第82回応用物理学会秋季学術講演会",,,,,2021,Sept.
"Takumi Akiyama,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Yiming Jiang,Chun-Yi Chen,Tso-Fu Mark Chang,Xun Luo,Daisuke Yamane,Masanori Mizoguchi,Osamu Kudo,Ryu Maeda,Masato Sone","Micro-Mechanical Characterization of Electrodeposited Ni-Co Alloys toward Design of MEMS Components","Micro and Nano Engineering Conference 2021 (MNE2021)",,,,,,2021,Sept.
"Tso-Fu Mark Chang,Hideaki Nakajima,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Hiroshi Toshiyoshi,Masato Sone","Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers",,"Advances in Microelectronics: Reviews","IFSA PUBLISHING, S.L.","Vol. 3",,,2021,Apr.
"Hitomi Watanabe,Tso-Fu Mark Chang,Michael  Schneider,Ulrich  Schmid,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electro-deposition and the Temperature Dependency",,"Electrochem","MDPI","Vol. 2",,"pp. 216-223",2021,Apr.
"曽根 正人,Tso-Fu Mark Chang,名越貴志,町田 克之,山根 大輔,伊藤浩之,益 一哉","医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価","日本金属学会 2021年春季講演大会","日本金属学会 2021年春季講演大会",,,,,2021,Mar.
"Yu-Hao Jen,Chia-Tso Mo,Yu-Wen Chen,Emile Martincic,Daisuke Yamane,Tso-Fu Chang,Masato Sone,Cheng-Yao Lo","Development and Characterization of Vertically Stacked Tactile Sensor with Hollow Structure",,"IEEE Sensors Journal","IEEE","Vol. 21","No. 5","pp. 5809-5818",2021,Mar.
"Yiming Jiang,Chun-Yi Chen,Tso-Fu Mark Chang,Xun Luo,Daisuke Yamane,Masato Sone","Electrodeposition of Ni-Co Alloys and the Mechanical Properties by Micro-Vickers Hardness Test",,"Electrochem","MDPI","Vol. 2","No. 1","pp. 1-9",2021,Jan.
"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties",,"Electrochem","MDPI","Vol. 1","No. 4","pp. 388-393",2020,Nov.
"Hao-Chun Tang,Tso-Fu Mark Chang,Yaw-Wang Chai,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect",,"Dislocation Mechanics of Metal Plasticity and Fracturing (RonaldW. Armstrong, Ed)","MDPI",,,"pp. 87-96",2020,Nov.
"Kosuke Suzuki,Yu-An Chien,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test","PRiME 2020","PRiME 2020",,,,,2020,Oct.
"Takashi Ichikawa,Ken Atsumi,Tatsuya Koga,Daisuke Yamane,Shin-ichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes","Design, Test, Integration & Packaging of MEMS/MOEMS",,,,,,2020,June
"Kosuke Suzuki,Tso-Fu Mark Chang,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki  Machida,Kazuya Masu,Masato Sone","Sample Geometry Effect on Mechanical Property of Gold Micro-Cantilevers by Micro-Bending Test",,"MRS Communications","Materials Research Society","Vol. 20",,"pp. 434-438",2020,May
"Kazuya Masu,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Ryo Shigeyama,Taiki Ogata,Yoshihiro Miyake","CMOS-MEMS Based Microgravity Sensor and Its Application",,"ECS Transactions",,"Vol. 97","No. 5","pp. 91-108",2020,Apr.
"Kyotaro Nitta,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Katsuyuki Machida,Hiroyuki  Ito,Kazuya Masu,Masato Sone","Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers",,"Journal of The Electrochemical Society","IOP Science","Vol. 167",,"pp. 082503",2020,Apr.
"渥美 賢,古賀 達也,市川 崇志,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar.
"Tatsuya Koga,Takashi Ichikawa,Daisuke Yamane,Shinichi Iida,Noboru Ishihara,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing","The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020)",,,,,,2020,Mar.
"曽根 正人,Hao-Chun Tang,Tso-Fu Mark Chang,山根 大輔,町田 克之,伊藤 浩之,益 一哉","貴金属めっき材料の結晶組織制御とその医用MEMS デバイスへの応用","日本金属学会 第166回講演大会","日本金属学会 第１６６回講演大会",,,,,2020,Mar.
"Yu-an Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposited High Strength Au-TiO2 Nano Composite Film for MEMS Devices","第67回応用物理学会春季学術講演会","第67回応用物理学会春季学術講演会",,,,,2020,Mar.
"入谷 友樹,新田京太朗,Yu-An Chien,Tso-Fu Mark Chang,山根 大輔,伊藤 浩之,町田 克之,益 一哉,曽根 正人","Au-Pd合金膜の電気メッキとその機械的特性","第67回応用物理学会春季学術講演会","第67回応用物理学会春季学術講演会",,,,,2020,Mar.
"市川 崇志,渥美 賢,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar.
"Kyotaro Nitta,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability","IEEE Sensors 2019","IEEE Conference Paper","2019 IEEE SENSORS",,,,2020,Jan.
"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film","MRS Fall Meeting 2019",,,,,,2019,Dec.
"Yukiya Tohyama,Hiroaki Honma,Noboru Ishihara,Hidehiko Sekiya,Hiroshi Toshiyoshi,Daisuke Yamane","Energy Harvesting from Non-Stational Environmental Vibrations using a Voltage-Boost Rectifier Circuit","19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2019)",,,,,,2019,Dec.
"山根大輔","IoT応用に向けた環境振動ＭＥＭＳエナジーハーベスタ技術","日本学術振興会 分子ナノテクノロジー第174委員会 第67回研究会",,,,,,2019,Dec.
"Kyotaro Nitta,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodepostion of Au-Cu Alloy  Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method","MRS Fall Meeting 2019",,,,,,2019,Dec.
"Tomoki Iriya,Kyotaro Nitta,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplating of Au-Pd Alloy Films and the Mechanical Properties","International Thin Films Conference (TACT 2019)",,,,,,2019,Nov.
"伊藤浩之,古賀達也,市川崇志,山根大輔,石原昇,三宅美博,町田克之,益一哉","兆し計測のための高感度MEMS加速度センサ技術","計測自動制御学会 システム・情報部門 学術講演会 2019",,,,,,2019,Nov.
"Atsushi Fujii,Kento Hisa,Musashi Kakugawa,Daisuke Yamane,Takayuki Shibata,Moeto Nagai","High-throughput Screening Device for Genes Related to Algal Phototaxis: Parallel Micro-Liquid Handling","The 4th International Symposium on Biomedical Engineering",,,,,,2019,Nov.
"Cheng-Yao Lo,Daisuke Yamane","High-Sensitivity Capacitive Tactile Sensor with Vertically Stacked Hollow Structures","The 4th International Symposium on Biomedical Engineering",,,,,,2019,Nov.
"市川 崇志,乙部 翔太,渥美 賢,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","3Dピラー型Au錘MEMS加速度センサ","第36回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  19am3-PS3-21",2019,Nov.
"市川 崇志,古賀 達也,山根 大輔,飯田 慎一,石原 昇,伊藤 浩之,Chang Tso-Fu Mark,曽根 正人,町田 克之,益 一哉","積層メタル技術で作製したMEMS加速度センサの衝撃特性評価","第11回集積化MEMSシンポジウム",,,,,"  19pm4-A-4",2019,Nov.
"古賀 達也,市川 崇志,田中 直登,緒方 大樹,大良 宏樹,山根 大輔,石原 昇,伊藤 浩之,曽根 正人,町田 克之,三宅 美博,益 一哉","微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討","第11回集積化MEMSシンポジウム",,,,,"  19pm4-A-3",2019,Nov.
"山根大輔","振動から電気を生み出す環境発電について","時代を刷新する会 新エネルギー委員会レクチュア",,,,,,2019,Nov.
"Yu-Hao Jen,Chia-Tso Mo,Kean Aw,Daisuke Yamane,Cheng-Yao Lo","Extensive Sensitivity Enhancement in Stacked Capacitive Tactile Sensors","IEEE Sensors 2019",,,,,,2019,Oct.
"Tatsuya Koga,Takashi Ichikawa,Naoto Tanaka,Taiki Ogata,Hiroki Ora,Daisuke Yamane,Noboru Ishihara,Hiroyuki Ito,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds","IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019)","IEEE Conference Paper","IEEE",,,,2019,Oct.
"市川 崇志,乙部 翔太,渥美 賢,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,曽根 正人,益 一哉","Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept.
"Kyotaro Nitta,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept.
"Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept.
"Tso-Fu Mark Chang,Yu-An Chien,Hao-Chun Tang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Gold-Based Micro-Structures by Alloying and Incorporation of Oxide Nanoparticles","第80回応用物理学会秋季学術講演会",,,,,,2019,Sept.
"Hao-Chun Tang,Tso-Fu Mark Chang,Yaw-Wang Chai,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect",,"Metals","MDPI","Vol. 9","No. 9","pp. 987",2019,Sept.
"Kyotaro Nitta,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Au-Cu alloy/Ti Layered micro-cantilevers toward MEMS Movable Components","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials",,,,"p. 46",2019,Sept.
"Hitomi Watanabe,Chun-Yi Chen,Tso-Fu Mark Chang,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Dependence Structure Stability of Ti/Au Layered Micro-Cantilevers","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials","The 1st Tokyo Tech-NCTU Joint Symposium on Advanced Materials",,,,"p. 45",2019,Sept.
"Hitomi Watanabe,Chun-Yi Chen,Tso-Fu Mark Chang,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept.
"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications","45th International Conference on Micro & Nano Engineering (MNE2019)","45th International Conference on Micro & Nano Engineering (MNE2019)",,,,,2019,Sept.
"山根大輔","超微弱振動から発電!:エネルギーハーベスタ用の低閾値電子回路技術","イノベーション・ジャパン２０１９ ?大学見本市＆ビジネスマッチング?",,,,,,2019,Aug.
"市川 崇志,新島 宏文,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","3軸Au錘MEMS加速度センサにおける検出電極構造の検討","令和元年電気学会センサ・マイクロマシン部門総合研究会",,,,,"pp. 67-72",2019,July
"Katsuyuki Machida,Daisuke Yamane,Toshifumi Konishi,Shin-ichi Iida,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Hiroyuki Ito,Kazuya Masu","MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology",,"ECS Transactions",,"Vol. 92",,"pp. 169-184",2019,July
"曽根正人,タン ハオチュン,Tso-Fu Mark Chang,陳君怡,山根大輔,町田克之,益一哉","超高感度加速度センサ実現のための高強度金合金材料の創製とその機械的特性評価","2019年 関西表面技術シンポジウム","電気鍍金研究会",,,,,2019,July
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","A MEMS Accelerometer for Sub-mG Sensing",,"Sensors and Materials",,"Vol. 31","no. 9","pp. 2883-2894",2019,July
"Keisuke Asano,Tso-Fu Mark Chang,Hao-Chun Tang,Takashi Nagoshi,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components",,"ECS Journal of Solid State Science and Technology",,"Vol. 8","No. 8","pp. P412-P415",2019,July
"Yu-Hong  Gao,Yu-Hao  Jen,Rongshun Chen,Daisuke Yamane,Cheng-Yao Lo","Five-fold sensitivity enhancement in a capacitive tactile sensor by reducing material and structural rigidity",,"Sensors & Actuators: A. Physical",,"vol. 293",,"pp. 167-177",2019,June
"Yukiya Tohyama,Hiroaki Honma,Noboru Ishihara,Hiroshi Toshiyoshi,Daisuke Yamane","Bandwidth Enhancement of Vibrational Energy Harvesters by a Voltage-Boost Rectifier Circuit","20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019 - EUROSENSORS XXXIII)",,,,,,2019,June
"Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May
"Kyotaro Nitta,Tso-Fu Mark Chang,Koichiro Tachibana,Hao-chun Tang,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test",,"Microelectronic Engineering",,"Vol. 215",,"pp. 111001",2019,May
"Ken Atsumi,Shota Otobe,Tatsuya Koga,Takashi Ichikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers","Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019)","IEEE Conference Paper","IEEE",,,,2019,May
"Masato Sone,Hao-Chun Tang,Masaharu Yoshiba,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Mechanical properties of electrodeposited gold-copper alloy by micro-compression test","The 2nd International Conference on Material Strength and Applied Mechanics","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,2019,May
"Kosuke Suzuki,Ken Hashigata,Keisuke Asano,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test","The 2nd International Conference on Material Strength and Applied Mechanics",,,,,,2019,May
"Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices",,"Microelectronic Engineering",,"Vol. 213",,"pp. 13-17",2019,May
"Daisuke Yamane","Energy Harvesters for Autonomous Wireless Sensors in True IoT Society","Nature's 150th anniversary symposium, THE FUTURE OF JAPANESE SCIENCE",,,,,,2019,Apr.
"渡邊 瞳,鈴木 拓真,Chen Chun-Yi,Chang Tso-Fu Mark,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","Ti/Au微小カンチレバーの温度依存性への積層構造の影響","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"渥美 賢,乙部 翔太,古賀 達也,市川 崇志,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","積層メタル技術によるピラー型容量検出電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"山根大輔","次世代ＩｏＴ社会に向けたＭＥＭＳ振動発電素子","第５回 BC（Beyond CMOS/ERM（Emerging Research Materials））合同委員会",,,,,,2019,Mar.
"新田 京太朗,Tang Haochun,Chen Chun-Yi,Chang Tso-Fu Mark,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","電気めっき法によるAu-Cu合金微小カンチレバーの作製","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"鈴木 康介,Ken Hashigata,浅野 啓介,Chun-Yi Chen,名越 貴志,Tso-Fu Mark Chang,山根 大輔,小西 敏文,町田 克之,伊藤 浩之,益 一哉,曽根 正人","微小曲げ試験による金材料の機械的強度のサンプル形状効果","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"乙部 翔太,渥美 賢,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","Au錘3軸MEMS加速度センサのためのSCD電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"市川 崇志,新島 宏文,古賀 達也,山根 大輔,飯田 慎一,伊藤 浩之,石原 昇,曽根 正人,町田 克之,益 一哉","3軸Au錘MEMS加速度センサにおける平行平板型電極の検討","第66回応用物理学会春季学術講演会",,,,,,2019,Mar.
"Chun-Yi Chen,Masaharu Yoshiba,Haochun Tang,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida","Pulse-Current Electrodeposition of Gold",,"Novel Metal Electrodeposition and the Recent Application","IntechOpen",,,,2019,Mar.
"Haochun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida","Electrodeposition of Gold Alloys and the Mechanical Properties",,"Novel Metal Electrodeposition and the Recent Application","IntechOpen",,,,2019,Mar.
"角川 武蔵,比佐 健人,山根 大輔,柴田 隆行,永井 萌土","藻類の走行性・遺伝子相関解析のための並列微小溶液操作技術の開発","平成30年度生体医歯工学共同研究拠点成果報告会",,,,,,2019,Mar.
"Cheng-Yao Lo,Daisuke Yamane","Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots","平成30年度生体医歯工学共同研究拠点成果報告会",,,,,,2019,Mar.
"Tso-Fu Mark Chang,Chun-Yi Chen,Yota Ishizuka,Minami Teranishi,Takuma Suzuki,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 2",,"pp. 23-48",2019,Feb.
"Koichiro Tachibana,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test",,"Microelectronic Engineering",,"Volume 207",,"pp. 33-36",2019,Jan.
"Daisuke Yamane,Hiroaki Honma,Hiroshi Toshiyoshi","A MEMS VIBRATORY ENERGY HARVESTER CHARGED BY AN OFF-CHIP ELECTRET","32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)",,,,,"pp. 1025-1028",2019,Jan.
"Daisuke Yamane,Shota Otobe,Ken Atsumi,Tatsuya Koga,Toshifumi Konishi,Teruaki Safu,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS","32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)",,,,,"pp. 684-687",2019,Jan.
"Yukiya TOHYAMA,Hiroaki HONMA,Noboru Ishihara,Hidehiko SEKIYA,Hiroshi Toshiyoshi,Daisuke Yamane","A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations","18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2018)",,,,,,2018,Dec.
"Motohiro Takayasu,Ippei Tsuji,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer",,"Sensors and Materials",,"Vol. 30","No. 12","pp. 2919-2926",2018,Dec.
"Daisuke Yamane","Sub-mG MEMS Inertial Sensor","4th WRHI Workshop on Asian Industry Highway",,,,,,2018,Nov.
"Musashi Kakugawa,Kento Hisa,Daisuke Yamane,Takayuki Shibata,Moeto Nagai","Parallel Manipulation of Small-volume Solutions for Analyzing Phototaxis and Gene Expression of Algae","The 3rd International Symposium on Biomedical Engineering",,,,,,2018,Nov.
"Cheng-Yao Lo,Daisuke Yamane","Vibration Characteristics of a High-Sensitivity Flexible Capacitive Tactile Sensor with Reduced Structural Rigidity","The 3rd International Symposium on Biomedical Engineering",,,,,,2018,Nov.
"Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","Sub-1mG MEMS Inertial Sensor for Biomedical Applications","The 20th Takayanagi Kenjiro Memorial Symposium joined with the 4th International Conference on Nano Electronics Research and Education（ICNERE2018）",,,,,,2018,Nov.
"Shota Otobe,Tatsuya Koga,Ken Atsumi,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Hiroyuki. Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes","31st International Microprocesses and Nanotechnology Conference (MNC2018)",,,,,,2018,Nov.
"市川 崇志,新島 宏文,古賀 達也,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","Au単一錘平行平板型3軸MEMS加速度センサの検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"古賀 達也,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Solid Solution Strengthening of Gold Based Materials  for MEMS Applications","The 35th SENSOR SYMPOSIUM on Sensors, Micromachines and Applied Systems",,,,,,2018,Oct.
"Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone.","Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone.","Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct.
"乙部 翔太,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ","第10回集積化MEMSシンポジウム",,,,,,2018,Oct.
"Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshib,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyotaro Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Keisuke Asano,Hao-chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Tso-Fu Mark Chang,Hao-chun Tang,Kyotaro Nitta,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposition of High Strength Au-Cu Alloys for MEMS Device","2018 International Conference on Solid State Devices and Materials (SSDM2018)","2018 International Conference on Solid State Devices and Materials (SSDM2018)",,,,,2018,Sept.
"Masato Sone,Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu","EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"",,,,,2018,Sept.
"Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"中島 英亮,Tso-Fu Mark Chang,Chun-Yi Chen,山根 大輔,小西 敏文,町田 克之,年吉 洋,益 一哉,曽根 正人","MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討","第79回応用物理学会秋季学術講演会","第79回応用物理学会秋季学術講演会",,,,,2018,Sept.
"Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology","Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development",,,,,,2018,Sept.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Takahiro Yamamoto,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Kazuya Masu,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake","CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease","4th International Conference on Condensed Matter and Materials Physics",,,,,,2018,Aug.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications",,"Microelectronic Engineering","Elsevier","Vol. 196",,"pp. 20-24",2018,June
"Shota Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection","Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)",,,,,,2018,June
"Masato Sone,Hao-Chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyoutarou Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Chun-Yi Chen,Hao-Chun Tang,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"HIdeaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,HIroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Ken Hashigata,Haochun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","The effect of acid pre-treatment on electroplating of gold on titanium substrate","32nd International Conference on Surface Modification Technologies (SMT32)",,,,,,2018,June
"Kyoutarou Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices","233rd ECS Meeting","233rd ECS Meeting",,,,,2018,May
"Daisuke Yamane","High-Sensitivity MEMS Inertial Sensor for Medical Applications","The 2nd Taiwan-Japan Joint Symposium in Taiwan",,,,,,2018,May
"伊藤浩之,山根大輔,小西敏文,道正志郎,石原昇,町田克之,曽根正人,三宅美博,益一哉","MEMS加速度センサと生体計測への応用","新化学技術推進協会 電子情報技術部会 マイクロナノシステムと材料・加工分科会 講演会",,,,,,2018,May
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys","22nd Topical Meeting of the International Society of Electrochemistry","22nd Topical Meeting of the International Society of Electrochemistry",,,,,2018,Apr.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices",,"Microelectronic Engineering",,"Vol. 187-188",,"pp. 105-109",2018,Apr.
"Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film","22nd Topical Meeting of the International Society of Electrochemistry",,,,,,2018,Apr.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology","13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)",,,,,"pp. WM-II-f<sub>3</sub>243",2018,Apr.
"古賀 達也,高安 基大,山根 大輔,伊藤 浩之,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Cheng-Yao Lo,Kazuya Masu,Daisuke Yamane","Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots",,,,,,,2018,Mar.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"新島 宏文,乙部 翔太,高安 基大,山根 大輔,小西 敏文,佐布 晃昭,伊藤 浩之,年吉 洋,町田 克之,益 一哉","高感度MEMS加速度センサのBrownian Noise評価に関する検討","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"小西 敏文,山根 大輔,佐布 晃昭,陳 君怡,Chang Tso-Fu Mark,伊藤 浩之,道正 志郎,石原 昇,曽根 正人,町田 克之,益 一哉,飯田 慎一","積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"伊藤 浩之,山根 大輔,小西 敏文,道正 志郎,石原 昇,町田 克之,曽根 正人,三宅 美博,益 一哉","集積化CMOS-MEMS技術による高感度慣性センサと応用システム","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"新島 宏文,乙部 翔太,高安 基大,山根 大輔,伊藤 浩之,佐布 晃昭,小西 敏文,道正 志郎,飯田 慎一,石原 昇,町田 克之,益 一哉","単一Au錘3軸差動MEMS加速度センサの検討","平成30年電気学会全国大会",,,,,,2018,Mar.
"高安 基大,古賀 達也,辻 一平,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,飯田 慎一,石原 昇,町田 克之,益 一哉","傾斜を用いた1mG MEMS加速度センサの分解能評価の検討","平成30年 電気学会 全国大会",,,,,,2018,Mar.
"伊藤 浩之,?根 ?輔,小西敏文,道正 志郎,?原 昇,町? 克之,曽根 正?,三宅 美博,益 ?哉","集積化CMOS-MEMS技術による?感度慣性センサと応?システム","応用物理学会第65回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Hao-Chun Tang,Ken Hashigata,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide",,"Surface and Coatings Technology","Elsevier","Vol. 350",,"pp. 1065-1070",2018,Mar.
"TangHao-Chun,Chun-Yi Chen,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","電解めっき法によるMEMS??銅合?の作製及び機械的特性評価","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"中島英亮,Chun-Yi Chen,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,年吉洋,益 ?哉,曽根 正?","電解めっき法によるTi/Au微?カンチレバーのヤング率評価","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"新? 京太朗,橘 航?朗,TangHao-Chun,Chun-Yi Chen,Tso-Fu Mark Chang,?根 ?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","?期振動試験によるAu-Cu合?微?カンチレバーの構造安定性","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"浅野 啓介,TangHao-Chun,Chun-Yi Chen,名越 貴志,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","電析制御による微??カンチレバーの曲げ特性の改善","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices",,"Journal of The Electrochemical Society",,"Vol. 165","No. 2","pp. D58-D63",2018,Jan.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers",,"IEICE Electronics Express",,"Vol. 15","no. 2","p. 20171227",2018,Jan.
"Tso-Fu Mark Chang,Chun-Yi Chen,Hao-Chun Tang,Masaharu Yoshiba,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors",,"Advances in Microelectronics Reviews","IFSA Publishing","Vol. 1",,"pp. 93-106",2017,Dec.
"Cheng-Yao Lo,Daisuke Yamane,Kazuya Masu","Force Response and Vibration Characteristics of Flexible Capacitive Sensors","The 2nd International Symposium on Biomedical Engineering",,,,,,2017,Nov.
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu","Sub-1mG Inertial Sensors by Multi-layer Metal Technology","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,"  F5-05",2017,Nov.
"Hirofumi Niijima,Motohiro Takayasu,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Chun Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu,Shinichi Iida","Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating","The 30th International Microprocesses and Nanotechnology Conference",,,,,,2017,Nov.
"Moeto Nagai,Musashi Kakugawa,Daisuke Yamane,Kazuya Masu","Vibration Testing of Microfluidic Devices for Cell Analysis: Toward a Chip in Everyday Life","The 2nd International Symposium on Biomedical Engineering",,,,,,2017,Nov.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Keisuke Asano,Haochun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Strengthening of Gold Micro-Cantilever by Control of Electroplating Conditions","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Structure Stability of Multi-Ti/Au-Layered Micro-Cantilever","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Strategies of Mechanical Strengthening in Electroplated  Au Materials","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Masato Sone,Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu","Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Tso-Fu Mark Chang,Haochun Tang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Enhancement of Metals Electroplated in Electrolyte Containing Supercritical CO2","IUMRS International Conference in Asia (IUMRS-ICA) 2017",,,,,,2017,Nov.
"Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Ultrahigh Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests","2017 MRS Fall Meeting",,,,,,2017,Nov.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Long-Term Vibration Testing of Ti/Au Micro-Cantilever Fabricated by Multi-Layer Metal Technology","2017 MRS Fall Meeting",,,,,,2017,Nov.
"高安 基大,道正 志郎,伊藤 浩之,山根 大輔,小西 敏文,町田 克之,石原 昇,益 一哉","MEMS慣性センサ用弛張発振型容量検出回路","第9回 集積化MEMSシンポジウム",,,,,,2017,Oct.
"乙部 翔太,高安 基大,山根 大輔,小西 敏文,佐布 晃昭,伊藤 浩之,道正 志郎,石原 昇,町田 克之,益 一哉","3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,,2017,Oct.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Utilization of supercritical carbon dioxide in the electrodeposition of Au films for MEMS application","TSCFA 2017 Annual Meeting",,,,,,2017,Oct.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Defect-Free and Uniform Electroplating of Gold on Titanium Surface for Design of MEMS Components","TACT2017 International Thin Films Conference",,,,,,2017,Oct.
"古賀 達也,辻 一平,高安 基大,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,石原 昇,町田 克之,益 一哉","積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討","第9回 集積化MEMSシンポジウム",,,,,,2017,Oct.
"折原 恒祐,高安 基大,道正 志郎,伊藤 浩之,山根 大輔,小西 敏文,石原 昇,町田 克之,益 一哉","発振型容量検出回路を用いたAu錘CMOS-MEMS加速度センサの検討","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  31am3-PLN-2",2017,Oct.
"新島 宏文,高安 基大,山根 大輔,小西 敏文,佐布 晃昭,伊藤 浩之,年吉 洋,町田 克之,益 一哉","静電容量型MEMSセンサにおけるブラウニアン・ノイズ評価手法の検討(2)","第34回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,"  01am2-PLN-8",2017,Oct.
"辻 一平,高安 基大,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,石原 昇,町田 克之,益 一哉","積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討","第9回集積化MEMSシンポジウム",,,,,"  01pm1-A-6",2017,Oct.
"小西 敏文,山根 大輔,佐布 晃昭,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"山根 大輔,小西 敏文,佐布 晃昭,橘 航一朗,寺西 美波,陳 君怡,Tso-Fu Mark Chang,曽根 正人,町田 克之,益 一哉","積層メタルMEMS慣性センサの長期振動特性評価","第9回集積化MEMSシンポジウム",,,,,,2017,Oct.
"Ippei Tsuji,Motohiro Takayasu,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"山根 大輔,小西 敏文,佐布 晃昭,橘 航一朗,寺西 美波,陳 君怡,Tso-Fu Mark Chang,曽根 正人,町田 克之,益 一哉","金めっきで形成したMEMS加速度センサの長期振動特性に関する検討","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"古賀 達也,辻 一平,高安 基大,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,石原 昇,町田 克之,益 一哉","積層メタル技術によるMEMS慣性センサの傾斜時感度特性の検討","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"辻 一平,高安 基大,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,石原 昇,町田 克之,益 一哉","積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"高安 基大,道正 志郎,伊藤 浩之,山根 大輔,小西 敏文,町田 克之,石原 昇,益 一哉","MEMS加速度センサ用高分解能容量検出回路","第78回 応用物理学会 秋季学術講演会",,,,,,2017,Sept.
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Mechanical Property Anisotropy of Pure Gold Evaluated by Micro-compression Test","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability Enhancement of Gold Micro-Cantilever with a Constrained at Top and Bottom of the Fixed-End","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Keisuke Asano,Hao-Chun Tang,Chun-yi Chen,Takashi Nagoshi,Tso-fu Mark Chang,Daisuke Yamane,Kazuya Masu,Masato Sone","Enahnced Bending Strength of Electrodeposited Pure Gold Canrilevers in Micro-Bending Test","43rd International Conference on Micro & Nano Engineering (MNE2017)","MNE2017",,,,,2017,Sept.
"Shouta Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes","2017 International Conference on Solid State Devices and Materials (SSDM 2017)",,,,,,2017,Sept.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices",,"Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems","IEEE Conference Publications",,,"pp. 264 - 267",2017,Aug.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY",,"Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","IEEE Conference Publications",,,"pp. 2187 - 2190",2017,Aug.
"辻 一平,高安 基大,伊藤 浩之,山根 大輔,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術を用いた高感度MEMS傾斜計の検討","第8回 集積化MEMS技術研究ワークショップ",,,,,,2017,July
"高安 基大,道正 志郎,伊藤 浩之,山根 大輔,小西 敏文,町田 克之,石原 昇,益 一哉","MEMS加速度センサ用高分解能容量検出回路の評価","第8回 集積化MEMS技術研究ワークショップ",,,,,,2017,July
"山根大輔","国際会議報告：The 12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017)",,"電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）",,"Vol. 137","No. 7","p. NL7_1",2017,July
"Chun-Yi Chen,Hao-Chun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrochemical Plating of Au-Cu Alloy Films for MEMS Sensor Applications","RACI National Centenary Conference",,,,,,2017,July
"Chun-Yi Chen,Hao-chun Tang,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplated Au-based Materials with High Micro-mecchanical Properties as MEMS accelerometer Components","21th International Conference on Solid State Ionics, SSI-21","SSI-21",,,,,2017,June
"Minami Teranishi,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices","21th International Conference on Solid State Ionics",,,,,,2017,June
"曽根 正人,Tso-Fu Mark Chang,Chun-yi Chen,山根 大輔,小西 敏文,町田 克之,益 一哉","非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー","第63回 国立大学共同利用・共同研究拠点 知の拠点セミナー",,,,,2017,June
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Bending Testing of Electrodeposited Gold for Applications as Movable Components in MEMS Devices",,"Microelectronic Engineering",,"Vol. 180",,"pp. 15-19",2017,June
"Hao-chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Mechanical Property Evaluation of Electroplated Au-Cu Alloys toward Applications in MEMS Accelerometers","21th International Conference on Solid State Ionics, SSI-21","SSI-21",,,,,2017,June
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Koichiro Tachibana,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Katsuyuki Machida,Kazuya Masu","Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology","The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)",,,,,"pp. 2187-2190",2017,June
"Masaharu Yoshiba,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Deformation Behavior of Electroplated Gold Composed of Nano-Columnar Grains Embedded in Micro-Columnar Textures",,"Materials Letters",,"Vol. 202",,"pp. 82-85",2017,May
"高安 基大,權田 惇晟,小西 敏文,山根 大輔,伊藤 浩之,道正 志郎,石原 昇,町田 克之,益 一哉","人体振動測定のためのMEMS慣性センサを用いたモジュールの検討","LSIとシステムのワークショップ2017",,,,,,2017,May
"Daisuke Yamane,Toshifumi Konishi,Hiroshi Toshiyoshi,Masato Sone,Katsuyuki Machida,Yoshihiro Miyake,Kazuya Masu","MEMS inertial sensors for biomedical applications","12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017)",,,,,,2017,Apr.
"Sari Yanagida,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Tensile Tests of Micro-Specimens Made of Electroplated Gold",,"Microelectronics Engineering",,"Vol. 174",,"pp. 6-10",2017,Apr.
"Chun-Yi Chen,Hao-Chun Tang,Masaharu Yoshiba,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Preparation and Characterization of Au-Cu Alloy Films for MEMS Accelerometer","21st Topical Meeting of the International Society of Electrochemistry",,,,,,2017,Apr.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Daisuke Yamane,Kazuya Masu,Masato Sone","A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices","IEEE-NEMS 2017","IEEE-NEMS 2017",,,,,2017,Apr.
"Hao-Chun Tang,Chun-Yi Chen,Masaharu Yoshiba,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High-Strength Electroplated Au-Cu Alloys as Micro-components in MEMS Devices",,"Journal of The Electrochemical Society",,"Vol. 164","No. 4","pp. D244-D247",2017,Apr.
"高安 基大,權田 惇晟,山根 大輔,伊藤 浩之,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術で作製したMEMS慣性センサのモジュール化の検討","第64回 応用物理学会 春季学術講演会",,,,,,2017,Mar.
"Daisuke Yamane,Kazuya Masu,Cheng-Yao Lo","Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots","平成28年度生体医歯工学共同研究拠点成果報告会","平成28年度生体医歯工学共同研究拠点成果報告会",,,,"p. P-34",2017,Mar.
"飯塚知希,山根 大輔,小西 敏文,伊藤 浩之,石原 昇,町田 克之,益 一哉","振動型エネルギーハーベスティングデバイスのためのSPICE系統合設計の検討","第64回応用物理学会春季学術講演会",,,,,"p. 14p-P3-13",2017,Mar.
"佐布 晃昭,小西 敏文,山根 大輔,年吉 洋,曽根 正人,益 一哉,町田 克之","積層メタル技術による3軸MEMS加速度センサのばね定数設計方法","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-17",2017,Mar.
"小西敏文,山根 大輔,佐布 晃昭,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル技術を用いたMEMS慣性センサにおける粘性定数の検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-16",2017,Mar.
"中島 英亮,Chang Tso-Fu Mark,陳 君怡,小西 敏文,町田 克之,年吉 洋,山根 大輔,益 一哉,曽根 正人","積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-15",2017,Mar.
"山根 大輔,小西 敏文,佐布 晃昭,中島 英亮,寺西 美波,陳 君怡,Chang Tso-Fu Mark,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-14",2017,Mar.
"橘 航一朗,Chang Tso-Fu Mark,Chen Chun-Yi,小西 敏文,町田 克之,年吉 洋,山根 大輔,益 一哉,曽根 正人","積層メタル技術によるTi/Auマイクロカンチレバーの疲労特性の検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-12",2017,Mar.
"鈴木 拓真,Chang Tso-Fu Mark,Chen Chun-Yi,小西 敏文,町田 克之,年吉 洋,山根 大輔,益 一哉,曽根 正人","積層メタル技術によるTi/Auマイクロカンチレバーの温度依存性のシミュレーションの検討","応用物理学会 2017年春季講演会","応用物理学会 2017年春季講演会",,,,"p. 14p-P3-11",2017,Mar.
"權田 惇晟,高安 基大,山根 大輔,伊藤 浩之,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","移動体制御による慣性センサ評価系の構築","第64回応用物理学会春季学術講演会",,,,,"p. 14p-P3-19",2017,Mar.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer",,"Microelectronics Reliability",,"Vol. 66",,"pp. 78-84",2016,Nov.
"Daisuke Yamane,Kazuya Masu,Cheng-Yao Lo","A Study on Flexible Tactile Sensor for Assistance Robots","1st International Symposium on Biomedical Engineering",,,,,"pp. 126-127",2016,Nov.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hideaki Nakajima,Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu","Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices","29th International Microprocesses and Nanotechnology Conference (MNC 2016)",,,,,"pp. 10D-5-1",2016,Nov.
"曽根正人,Tso-Fu Mark Chang,Chun-yi Chen,山根大輔,益一哉,町田克之","微小電気機械システムのための超臨界流体を用いた金属皮膜形成技術 （招待講演）","第6回CSJ化学フェスタ","第6回CSJ化学フェスタ","日本化学会",,,,2016,Nov.
"小西 敏文,山根大輔,伊藤 浩之,道正 志郎,石原 昇,年吉 洋,益 一哉,町田 克之","マルチフィジクスシミュレーションを用いたCMOS-MEMS慣性センサのノイズ解析手法","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-007",2016,Oct.
"佐布 晃昭,小西 敏文,山根大輔,年吉 洋,曽根 正人,益 一哉,町田 克之","積層メタル技術によるMEMS加速度センサのばね定数設計方法","第8回集積化MEMSシンポジウム",,,,,"p. 25pm4-PM-008",2016,Oct.
"山根大輔,小西 敏文,佐布 晃昭,曽根 正人,年吉 洋,益 一哉,町田 克之","Sub-1mG検出へ向けた積層メタルMEMS慣性センサ","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-001",2016,Oct.
"山根大輔,小西 敏文,佐布 晃昭,伊藤 浩之,曽根 正人,年吉 洋,益 一哉,町田 克之","差動型積層メタルMEMS加速度センサの検討","第8回集積化MEMSシンポジウム",,,,,"p. 25am2-PM-003",2016,Oct.
"權田 惇晟,高安 基大,山根 大輔,小西 敏文,伊藤 浩之,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討","集積化MEMSシンポジウム",,,,,"p. 25pm4-PM-006",2016,Oct.
"高安 基大,道正 志郎,伊藤 浩之,石原 昇,山根 大輔,小西 敏文,町田 克之,益 一哉","RC発振器型高感度容量検出回路","第8回 集積化MEMSシンポジウム",,,,,,2016,Oct.
"浅野 啓介,TangHao-Chun,Chang Tso-Fu Mark,Chen Chun-Yi,山根大輔,町田克之,益一哉,曽根正人,名越貴志","微小曲げ試験による金めっきで作製した微小カンチレバーの機械的特性評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"柳田佐理,Chang Tso-Fu Mark,Chen Chun-Yi,山根大輔,町田克之,益一哉,曽根正人,名越貴志","微小引張試験片を用いたMEMS用金めっき材料の機械的特性の評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"葭葉将治,Chang Tso-Fu Mark,Chen Chun-Yi,山根大輔,町田克之,益一哉,曽根正人,名越貴志","高感度MEMS加速度センサー用金電気めっきの変形挙動および強度の結晶方位依存性評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"寺西美波,Chang Tso-Fu Mark,Chen Chun-Yi,山根大輔,益一哉,曽根正人,小西敏文,町田克之,年吉洋","電解金めっき法により作製した金/チタン積層構造を有する微小カンチレバーの構造安定性の評価","第３３回「センサ・マイクロマシンと応用システム」シンポジウム","第３３回「センサ・マイクロマシンと応用システム」シンポジウム",,,,,2016,Oct.
"曽根 正人,Chang Tso-Fu Mark,陳 君怡,山根 大輔,益 一哉,町田 克之","高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 （招待講演）","日本学術振興会・第172委員会","日本学術振興会・第172委員会",,,,,2016,Oct.
"Chun-Yi Chen,Masaharu Yoshiba,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Fine Grained Au Films with Controllable Mechanical Strength by Pulse Plating","The 2016 PRiME Meeting",,,,,,2016,Oct.
"Toshifumi Konishi,Daisuke Yamane,Teruaki Safu,Masato Sone,Hiroshi Toshiyoshi,Kazuya Masu,Katsuyuki Machida","A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology","IEEE Sensors 2016","IEEE Proceeding",,,,"pp. 1162-1164",2016,Oct.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhancement of Mechanical Properties in Au Films Electroplated with Supercritical Carbon Dioxide","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.
"Kazuya Masu,Daisuke Yamane,Katsuyuki Machida,Masato Sone,Yoshihiro Miyake","Development of High Sensitivity CMOS-MEMS Inertia Sensor and its Application to Early-Stage Diagnosis of Parkinson's Disease","the 46th European Solid-State Device Research Conference (ESSDERC)","the 46th European Solid-State Device Research Conference (ESSDERC)",,,,"pp. 99-104",2016,Sept.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroshi Toshiyoshi,Masato Sone,Kazuya Masu,Katsuyuki Machida","A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology","2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)",,,,,"pp. 485-486",2016,Sept.
"Toshifumi Konishi,Daisuke Yamane,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Hiroshi Toshiyoshi,Kazuya Masu","A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System","2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016)",,,,,"pp. 673-674",2016,Sept.
"高安 基大,道正 志郎,伊藤 浩之,石原 昇,山根 大輔,益 一哉","RC発振器型容量検出回路の高感度化の検討","2016年 電子情報通信学会 ソサイエティ大会",,,,,,2016,Sept.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications","第77回応用物理学会秋季学術講演会",,,,,"pp. 15a-B10-13",2016,Sept.
"佐布 晃昭,小西 敏文,山根大輔,年吉 洋,曽根 正人,益 一哉,町田 克之","積層メタル技術によるMEMS加速度センサのばね定数設計方法（I）","第77回応用物理学会秋季学術講演会",,,,,"pp. 15p-B10-8",2016,Sept.
"山根大輔,小西 敏文,佐布 晃昭,曽根 正人,年吉 洋,益 一哉,町田 克之","Sub-1mG検出へ向けた積層メタルMEMS慣性センサ","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-2",2016,Sept.
"山根大輔,小西 敏文,佐布 晃昭,伊藤 浩之,道正 志郎,石原 昇,曽根 正人,年吉 洋,益 一哉,町田 克之","積層メタル差動型MEMS加速度センサの基礎検討","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-3",2016,Sept.
"小西 敏文,山根大輔,伊藤 浩之,道正 志郎,石原 昇,年吉 洋,益 一哉,町田 克之","CMOS-MEMS慣性センサにおける機械的ノイズの解析手法","第77回応用物理学会秋季学術講演会",,,,,"pp. 14p-P5-1",2016,Sept.
"Hao-chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhancement of Mechanical Strength in Au Films Electroplated with Supercritical Carbon Dioxide",,"Electrochemistry Communications",,"Vol. 72",,"pp. 126-130",2016,Sept.
"Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhanced mechanical property of metallic films with supercritical carbon dioxide for micro-electrical-mechanical system accelerometer","The 15th Symposium on Development of Supercritical Fluid Technology and Application and The 2nd International Workshop on Supercritical Fluid Dyeing Technology",,,,,,2016,Sept.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Micro-Bending Tests of Pure Gold Cantilevers for Applications as Movable Components in MEMS Devices","MNE2016, 42nd Micro& Nano Engineering","MNE2016, 42nd Micro& Nano Engineering",,,,,2016,Sept.