"Xu Sanchuan,Yuki Taoka,Shigeki Saito","Enhanced Attractive Force via Tip Rotatability in Beam-Type Electrostatic Chuck for Advanced Robotic Application","2024 MRS Fall Meeting",,,,,,2024,Dec. "Sanchuan XU,Yuki Taoka,Shigeki SAITO","Attractive Force Increased by Rotational Degree Of-Freedom Tip Structure Used in Beam Structure Electrostatic Chucks","2024年度精密工学会春季大会学術講演会",,,,,,2024,Mar. "Yuki Taoka,Tomohiro Ryo,Sanchuan XU,Shigeki SAITO","Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes",,"Engineering Research Express","IOP Publishing","Vol. 6","No. 1","pp. 015046",2024,Jan. "Sanchuan Xu,Yuki Taoka,Shigeki Saito","Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks",,"Results in Engineering","Elsevier","Vol. 24",,"pp. 103365",2024, "Yuki Taoka,Terumichi Hayashi,Sanchuan XU,Shigeki SAITO","Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure",,"Advanced Robotics","Taylor & Francis","Vol. 37","No. 23","pp. 1507-1519",2023,Nov. "Sanchuan XU,Yuki Taoka,Shigeki SAITO","Rotational-Degree-Of -Freedom Tip Structure Used in Collective Beam Structure Electrostatic Chuck for Curved Surfaces","2022年度精密工学会春季大会学術講演会","2022年度精密工学会春季大会学術講演会論文集",,,,,2022,Mar.