"山中 希未斗,仁田 帆南,河原 和馬,中川 茂樹,?村 陽太","CoFeB-SiO2グラニュラー薄膜における磁気異方性のアニール温度依存性????","粉末冶金協会 2024年度春期大会(第133回講演会)",,," 1-14A",,,2024,May "Y. Takamura,H. Nitta,K. Kawahara,T. Kaneko,R. Ishido,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Fabrication of CoFeB?SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors",,"IEEE Transactions on Magnetics","IEEE","Vol. 59","Issue 11","pp. 1-4",2023,July "Y. Takamura,H. Nitta,K. Kawahara,T. Kaneko,R. Ishido,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors","Intermag2023","Intermag 2023 Digest Book",," MOA-05",,,2023,May "仁田帆南,金子忠幸,河原和馬,石戸亮祐,宮?達也,細田尚揮,藤?敬介,中川茂樹,高村陽太","対向ターゲット式スパッタで作製したCoFeB-SiO2薄膜を用いた長方形スパイラルインダクタ","令和5年電気学会全国大会",,," 2-095",,,2023,Mar. "河原和馬,金子忠幸,安田智貴,棚瀬純平,高村陽太,藤崎敬介,中川茂樹","対向ターゲット式スパッタ法による高周波動作用CoZrO 薄膜の作製","第45回日本磁気学会学術講演会","第45 回日本磁気学会学術講演概要集",," 02pC-4",,,2021,Sept.