"Yuki Taoka,Terumichi Hayashi,Sanchuan XU,Shigeki SAITO","Development of a method for attaching thin films to curved surfaces using a bipolar electrostatic chuck with a collective beam structure",,"Advanced Robotics","Taylor & Francis","Vol. 37","No. 23","pp. 1507-1519",2023,Nov.
"Yuki Taoka,Terumichi Hayashi,Pasomphone Hemthavy,Kunio Takahashi,Shigeki Saito","Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling",,"Engineering Research Express","IOP Publishing","Volume 4","Number 1",,2022,Jan.
"林 輝道,田岡 祐樹,齊藤 滋規","集合梁構造を有する双極型静電吸着デバイスを用いた曲面形状への薄膜対象物貼り付け手法の開発","2021年度精密工学会春季大会学術講演会",,,,,,2021,Mar.
"Terumichi Hayashi,Yuki Taoka,Shigeki Saito","Development of a Compliant Bipolar Electrostatic Chuck Having 3D-Printed Elastically-Deformable Beams for Handling Large Film","MRS Fall Meeting and Exhibit 2019",,,,,,2019,Dec.
"林輝道,HEMTHAVYPASOMPHONE,高橋邦夫,齋藤滋規","集合梁構造により表面柔軟性を有する双極型静電吸着デザイスの大面積化","2019年度精密工学会春季大会","2019年度精密工学会春季大会講演論文集","公益社団法人精密工学会",,,"p. 30",2019,Mar.