"Yukimura Tokita,Takuya Hoshii,Hitoshi Wakabayashi,KAZUO TSUTSUI,Kuniyuki KAKUSHIMA","Identification of compressive strain in thin ferroelectric Al1?xScxN films by Raman spectroscopy",,"Japanese Journal of Applied Physics",,"Volume 63","Number 4"," 04SP31",2024,Apr.