"Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment","CPIT2024, New Method of Damage and Failure Analysis of Structural Part","CPIT2024, New Method of Damage and Failure Analysis of Structural Part",,,,,2024,Oct. "Tatsuhiko Mori,Tomoyuki Kurioka,Chun-Yi Chen,Tso-Fu Mark Chang,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)","50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)",,,,,2024,Sept. "森 達彦,栗岡 智行,Chen Chun-Yi,Chang Tso-Fu Mark,町田 克之,伊藤 浩之,三宅 美博,曽根 正人","Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価","第71回応用物理学会春季学術講演会","Proc. The 71st JSAP Spring MeetinProc.",,,,"p. 23a-12K-2",2024,Mar.