"Hao-Chun Tang,Tso-Fu Mark Chang,Yaw-Wang Chai,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect",,"Dislocation Mechanics of Metal Plasticity and Fracturing (RonaldW. Armstrong, Ed)","MDPI",,,"pp. 87-96",2020,Nov.
"Yu-An Chien,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Co-Electrodeposition of Au-TiO2 Nanocomposite and the Micro-Mechanical Properties",,"Electrochem","MDPI","Vol. 1","No. 4","pp. 388-393",2020,Nov.
"Akihiro Uchiyama,Takasi Itikawa,Sayaka Koga,Katsuyuki Machida,Kazuya Masu,Noboru Ishihara,Shinichi Iida,Hiroyuki Ito","Au錘一軸MEMS加速度センサの差動容量型電極構造の検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct.
"Takasi Itikawa,Akihiro Uchiyama,Sayaka Koga,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu,Shinichi Iida,Hiroyuki Ito","100 nG/√Hz レベルを目指した分割 2 重電極を有する単一Au錘 3 軸 MEMS 加速度センサの検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct.
"Kohei Shibata,Takasi Itikawa,Sayaka Koga,Katsuyuki Machida,Kazuya Masu,Noboru Ishihara,Shinichi Iida,Hiroyuki Ito","高分解能単一Au 錘CMOS-MEMS 加速度センサの検討","第12回集積化MEMSシンポジウム",,,,,,2020,Oct.
"Takashi Ichikawa,Kohei Shibata,Tatsuya Koga,Katsuyuki Machida,Shinichi Iida,Noboru Ishihara,Kazuya Masu,Hiroyuki Ito","A High Resolution Single Gold Proof-Mass CMOS-MEMS Accelerometer","International Conference on Solid State Devices and Materials",,,,,,2020,Sept.
"Akihiro Uchiyama,Takasi Itikawa,Sayaka Koga,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","マイクロGレベルセンシングのための金錘1軸差動容量型MEMS加速度センサ","第81回 応用物理学会秋季学術講演会",,,,,,2020,Sept.
"Takasi Itikawa,Ken Atsumi,Sayaka Koga,Shinichi Iida,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu,Hiroyuki Ito","100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討","第81回 応用物理学会秋季学術講演会",,,,,,2020,Sept.
"本田優斗,田中佐和子,崔容俊,Toshihiko Noda,Kazuhiro Takahashi,Kazuaki Sawada,Hitoshi Ishii,Katsuyuki Machida,Hiroyuki Ito,二階堂靖彦,Mitsumasa Saito,Shinichi Yoshida","フォトゲート型蛍光センサによるレジオネラ属菌の識別方法の検討","令和2年度E部門総合研究会",,,,,,2020,July
"Takashi Ichikawa,Ken Atsumi,Tatsuya Koga,Daisuke Yamane,Shin-ichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes","Design, Test, Integration & Packaging of MEMS/MOEMS",,,,,,2020,June
"Kazuya Masu,Katsuyuki Machida,Daisuke Yamane,Hiroyuki Ito,Noboru Ishihara,Tso-Fu Mark Chang,Masato Sone,Ryo Shigeyama,Taiki Ogata,Yoshihiro Miyake","CMOS-MEMS Based Microgravity Sensor and Its Application",,"ECS Transactions",,"Vol. 97","No. 5","pp. 91-108",2020,Apr.
"Kyotaro Nitta,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Shinichi Iida,Daisuke Yamane,Katsuyuki Machida,Hiroyuki  Ito,Kazuya Masu,Masato Sone","Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers",,"Journal of The Electrochemical Society","IOP Science","Vol. 167",,"pp. 082503",2020,Apr.
"Takasi Itikawa,Ken Atsumi,Sayaka Koga,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar.
"Ken Atsumi,Sayaka Koga,Takasi Itikawa,Daisuke Yamane,Shinichi Iida,Hiroyuki Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討","第67回応用物理学会春季学術講演会",,,,,,2020,Mar.
"Tatsuya Koga,Takashi Ichikawa,Daisuke Yamane,Shinichi Iida,Noboru Ishihara,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing","The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020)",,,,,,2020,Mar.
"Kyotaro Nitta,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Shinichi Iida,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability","IEEE Sensors 2019","IEEE Conference Paper","2019 IEEE SENSORS",,,,2020,Jan.