"HIROSHI AKATSUKA","発光分光および機械学習を用いたプラズマの電子温度・密度の実用的計測","(独)日本学術振興会 R052 DX プラズマプロセス委員会 第5 回研究会","R052 DXプラズマプロセス委員会 第5 回研究会 要旨集","(独)日本学術振興会 R052 DX プラズマプロセス委員会",,,,2024,Apr.
"Hiroshi Akatsuka","Quantitative analysis of optical emission spectroscopy for plasma process monitoring",,"Japanese Journal of Applied Physics","IOP Publishing",,,,2024,Apr.
"Yosuke Shimada,Hiroshi Akatsuka","Evaluating plasma fluctuation by collisional-radiative model using Malliavin derivative",,"Japanese Journal of Applied Physics","IOP Publishing",,,,2024,Apr.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement","The 71st JSAP Spring Meeting","Extended Abstracts of the 71st JSAP Spring Meeting","The Japan Society of Applied Physics (JSAP)",,,"p. 07-009",2024,Mar.
"Wataru Kikuchi,Yuya Yamashita,Atsushi Nezu,Hiroshi Akatsuka","Analysis of Atomospheric-pressure Non-equiribrium Ar Plasma Based on Continuum and Line spectra with Weighted Analysis","The 71st JSAP Spring Meeting","Extended Abstracts of the 71st JSAP Spring Meeting","The Japan Society of Applied Physics (JSAP)",,,"p. 07-003",2024,Mar.
"Kenta Ishi,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Kazuma Yoneda,Shuhei Watanabe,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Population Kinetics and Number Densities of Excited Species in Nitrogen Inductively Coupled Plasma","ISPlasma2024/IC-PLANTS2024/APSPT-13","Proc. ISPlasma2024/IC-PLANTS2024/APSPT-13","Organizing Committee of ISPlasma2024/IC-PLANTS2024/APSPT-13",,,,2024,Mar.
"Kiyoyuki Yambe,Tomoya Izumida,Iwao Ohyama,Hiroshi Akatsuka","Comparison of Electron Densities and Temperatures in Helium and Argon Nonthermal Atmospheric-Pressure Plasmas by Continuum Spectral Analysis",,"IEEE Transactions on Plasma Science","IEEE","Vol. 52","No. 2","pp. 384-394",2024,Jan.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Kenta Ishi,Shuhei Watanabe,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model",,"J. Vac. Sci. Technol. A","AIP Publishing","Vol. 42","No. 2","  023003",2024,Jan.
"Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Wataru Kikuchi,Kenta Ishi,Shuhei Watanabe,Atsushi Nezu,Hiroshi Akatsuka","Spatial Diagnosis of Electron Temperature and Density of Argon Inductively Coupled Plasma by Improved Spectral Tomography Algorithm","The 41st Symposium on Plasma Processing (SPP-41)","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 64 - 65",2024,Jan.
"Yosuke Shimada,Hiroshi Akatsuka","For control method of plasma fluctuation using Malliavin derivative","The 41st Symposium on Plasma Processing","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 91 - 92",2024,Jan.
"Kohei Yamashita,Wataru Kikuchi,Kenta Ishi,Jun Enomoto,Atsushi Nezu,Hiroshi Akatsuka","Optical Emission Spectroscopy Measurement of Vibrational and Rotational Temperatures in Ar/N2 Mixed Atmospheric-Pressure Non-Equilibrium Plasma","The 41st Symposium on Plasma Processing","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 84 - 85",2024,Jan.
"Shuhei Watanabe,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Wataru Kikuchi,Kenta Ishi,Atsushi Nezu,Hiroshi Akatsuka","Optical Emission Spectroscopic Measurement of Inductively Coupled Oxygen Plasma","The 41st Symposium on Plasma Processing","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 82 - 83",2024,Jan.
"Kenta Ishi,Kenta Doi,Tetsuji Kiyota,Yuya Yamashita,Kazuma Yoneda,Shuhei Watanabe,Kazuki Shimatani,Atsushi Nezu,Hiroshi Akatsuka","Discussion on the Relationship between Number Densities of Excited States and Electron Temperature in Inductively Coupled Nitrogen Plasma","The 41st Symposium on Plasma Processing","Proceedings of 41st Symposium on Plasma Processing (SPP-41)","Plasma Electronics Division, Japan Society of Applied Physics",,,"pp. 30-31",2024,Jan.