"松谷晃宏,小山二三夫,大槻秀夫","固体ソースドライエッチング",,"電気学会 プラズマ/パルスパワー合同研究会",,,"  PST-10-069, PPT-10-089","pp. 17-22",2010,Dec.
"Akihiro Matsutani,Ayako Takada","High-frequency single-cell isolation of bacteria using microenclosure array",,"Jpn. J. Appl. Phys.","The Japan Society of Applied Physics","Vol. 49","  127201","pp. 1-4",2010,Dec.
"Akihiro Matsutani,Hideo Ohtsuki,Fumio Koyama","Dry Etching of Si by Solid Source I2 Inductively Coupled Plasma","23rd International Microprocesses and Nanotechnology Conference,MNC2010",,,,"  11D-8-54",,2010,Nov.
"Ayumi Fuchida,Takeru Sakairi,Akihiro Matsutani,Fumio Koyama","Characterizations of Reflection-type Slow Light Optical Switches","16th MicroOptics Conference, MOC2010",,,,"  TB6",,2010,Oct.
"佐野勇人,中田紀彦,松谷晃宏,小山二三夫","マイクロマシン構造を用いた面発光レーザの波長温度係数制御",,"第71 回応用物理学会学術講演会",,,"  16p-H-3",,2010,Sept.
"松谷 晃宏,大槻 秀夫,小山 二三夫","I<sub>2</sub>-ICP によるSi の反応性イオンエッチング",,"第71 回応用物理学会学術講演会",,,"  14p-ZG-4",,2010,Sept.
"Hayato Sano,Norihiko Nakata,Akihiro Matsutani,Fumio Koyama","Controlled temperature dependence of lasing wavelength of VCSELs with a thermally actuated cantilever","2010 IEEE International Semiconductor Laser Conference, ISLC Kyoto",,,"  WC5",,"pp. 160-161",2010,Sept.
"淵田歩,松谷晃宏,小山二三夫","スローライトを利用した反射型光スイッチの小型化",,"OPE研究会,信学技報",,,,"pp. 75-78",2010,Sept.
"今村明博,松谷晃宏,小山二三夫","多波長面発光レーザアレイと集積可能な小型光合波器の検討",,"第71 回応用物理学会学術講演会",,,"  16p-H-6",,2010,Sept.
"坂入健,坂口孝浩,松谷晃宏,小山二三夫","スローライト光導波路デバイスのゲート動作とスポットサイズ分散特性",,"第57回応用物理学関係連合講演会",,"  18p-P6-22",,"  05-120",2010,Sept.
"Akihiro Imamura,Akihiro Matsutani,Fumio Koyama","Multi-wavelength 1060nm-band VCSEL Array with Tapered Hollow Waveguide Multiplexer","2010 IEEE International Semiconductor Laser Conference, ISLC Kyoto",,,"  MB3",,"pp. 7-8",2010,Sept.
"Akihiro Imamura,Akihiro Matsutani,Fumio Koyama","Tapered hollow waveguide multiplexer for multi-wavelegth VCSEL array","2010 International Nano-Optoelectronics Workshop, iNOW 2010",,,,"  P11","pp. 170-171",2010,Aug.
"Hayato Sano,Norihiko Nakata,Akihiro Matsutani,Fumio Koyama","Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure","2010 International Nano-Optoelectronics Workshop, iNOW 2010",,,,"  P15","pp. 286-287",2010,Aug.
"Ayumi Fuchida,Akihiro Matsutani,Fumio Koyama","Compact Reflection-type Optical Switch with Slowing Light","15th OptoElectronics and Communications Conference",,,"  9D2-3",,"pp. 836-837",2010,July
"Hayato Sano,Norihiko Nakata,Akihiro Matsutani,Fumio Koyama","Wavelength Trimming of MEMS VCSELs for Post-process Wavelength Allocation","International Conference on Indium Phosphide and Related Materials",,,,"  ThA1-5","pp. 397-400",2010,June
"Norihiko Nakata,Hayato Sano,Akihiro Matsutani,Fumio Koyama","Proposal of Multi-Wavelength Integration of Athermal GAAS VCSEL Array with Thermally Actuated Cantilever Structure","International Conference on Indium Phosphide and Related Materials",,,,"  WeP35","pp. 299-302",2010,June
"Akihiro Matsutani,Hideo Ohtsuki,FUMIO KOYAMA","Reactive Ion Etching of Si Using Ar/F2 Plasma",,"Jpn. J. Appl. Phys.",,"Vol. 49",,"  06GH05",2010,June
"松谷晃宏,大槻秀夫,小山二三夫","Ar/F2 を用いたSi の反応性イオンエッチングにおけるプラズマの特性",,"第57回応用物理学関係連合講演会",,,"  18a-S-7",,2010,Mar.
"Takayoshi Fujisawa,Takahiro Sakaguchi,Akihiro Matsutani,Fumio Koyama","In-plane Optical Coupling to Bragg Reflector Slow Light Waveguide Devices",,"G-COE International Symposium",,,"  P-41",,2010,Mar.
"Ayumi Fuchida,Takahiro Sakaguchi,Akihiro Matsutani,Fumio Koyama","Optical Switch with Slowing Light in Bragg Reflector Waveguide",,"G-COE International Symposium",,,"  P-40",,2010,Mar.
"Yuuki Hashidume,Akihiro Matsutani,Fumio Koyama","Fabrication of High Contrast Grating with  Nanoimprint Process",,"G-COE International Symposium",,,"  P-5",,2010,Mar.
"Norihiko Nakata,Hayato Sano,Akihiro Matsutani,Fumio Koyama","Multi-Wavelength Integration of Athermal VCSELs with a Micromachined Cantilever",,"G-COE International Symposium",,,"  P-3",,2010,Mar.
"Hayato Sano,Norihiko Nakata,Matsutani Akihiro,Fumio Koyama","Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure",,"G-COE International Symposium",,,"  P-2",,2010,Mar.
"中田紀彦,佐野勇人,松谷晃宏,小山二三夫","マイクロマシン構造を用いたアサーマル面発光レーザの多波長集積化の検討?",,"第57回応用物理学関係連合講演会",,,"  19a-E-5",,2010,Mar.
"佐野勇人,中田紀彦,松谷晃宏,小山二三夫","マイクロマシン構造を用いた面発光レーザの波長トリミング",,"第57回応用物理学関係連合講演会",,,"  19a-E-4",,2010,Mar.
"橋爪佑樹,松谷晃宏,小山二三夫","熱ナノインプリントを用いた高屈折率差サブ波長回折格子製作の検討",,"第57回応用物理学関係連合講演会",,,"  18p-P6-21",,2010,Mar.
"高梨裕,加藤 智行,松谷晃宏,坂口 孝弘,植之原裕行,小林 功郎","凹面鏡とVCSELを用いた二往復共振器モード同期レーザにおける位置ずれトレランス解析",,"2010年電子情報通信学会総合大会, 仙台, 2010年3月","一般社団法人電子情報通信学会",,,"pp. 285",2010,