"Seungman Choi,Kazuki Wakabayashi,KUNIO TAKAHASHI,Shigeki SAITO","Development of a Bipolar Electrostatic Chuck Module having a Beam-array Assembly using a Multiple-Etching Process",,"Journal of Micromechanics and Microengineering","IOP Publishing",,,,2018,Oct.
"河鰭 康平,HEMTHAVYPASOMPHONE,高橋邦夫,齋藤滋規","微細毛構造を有するシリコン双極型静電チャックの接触面の平滑さと微細毛長が静電力に与える影響","日本機械学会第9回「マイクロ・ナノ工学シンポジウム」","日本機械学会第9回マイクロ・ナノシンポジウム講演論文集",,,,,2018,Oct.
"Ryo Fujiwara,Yoji Iguchi,KUNIO TAKAHASHI,Shigeki SAITO","Humidity dependence of electrostatic pick-and-place operation of a micro dielectric particle considering surface conductivity and capillary condensation",,"Journal of Applied Physics","AIP Publishing","Vol. 124","No. 6","pp. 064303",2018,Aug.
"工藤健太,若林一貴,HEMTHAVYPASOMPHONE,高橋邦夫,齋藤滋規","集合梁構造を持つ双極型静電吸着装置による対象物離脱のための手先軌道の実験的検討","2018年度精密工学会春季大会","精密工学会学術講演会講演論文集","公益社団法人精密工学会",,,"p. 51-52",2018,Mar.
"児玉理央,若林一貴,HEMTHAVYPASOMPHONE,高橋邦夫,齋藤滋規","表面に凹凸形状を有する誘電体の把持・離脱を目的とした微細毛構造を持つ双極型静電吸着装置の配列密度に関する実験的検討","2018年度精密工学会春季大会","精密工学会学術講演会講演論文集","公益社団法人精密工学会",,,"p. 53-54",2018,Mar.
"Dooyoung Baek,Shigeki SAITO,KUNIO TAKAHASHI","Estimating work of adhesion using spherical contact between a glass lens and a PDMS block",,"Journal of Adhesion Science and Technology","Taylor & Francis","Vol. 32","No. 2","pp. 158-172",2018,Jan.
"ｻﾘﾕｺﾌﾐﾊｲﾙ,井口洋二,HEMTHAVYPASOMPHONE,齋藤滋規,高橋邦夫","くし状構造の積層による側面接触型弾性梁集合体の試作","24rd Symposium on “Microjoining and Assembly Technology in Electronics” Mate2018","24rd Symposium on “Microjoining and Assembly Technology in Electronics”",,,,"pp. 261-264",2018,Jan.