"Motohiro Takayasu,Ippei Tsuji,Hiroyuki Ito,Daisuke Yamane,Shiro Dosho,Toshifumi Konishi,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer",,"Sensors and Materials",,"Vol. 30","No. 12","pp. 2919-2926",2018,Dec.
"Shota Otobe,Tatsuya Koga,Ken Atsumi,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Hiroyuki. Ito,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes","31st International Microprocesses and Nanotechnology Conference (MNC2018)",,,,,,2018,Nov.
"Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","Sub-1mG MEMS Inertial Sensor for Biomedical Applications","The 20th Takayanagi Kenjiro Memorial Symposium joined with the 4th International Conference on Nano Electronics Research and Education（ICNERE2018）",,,,,,2018,Nov.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Solid Solution Strengthening of Gold Based Materials  for MEMS Applications","The 35th SENSOR SYMPOSIUM on Sensors, Micromachines and Applied Systems",,,,,,2018,Oct.
"Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone.","Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct.
"乙部 翔太,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ","第10回集積化MEMSシンポジウム",,,,,,2018,Oct.
"古賀 達也,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"市川 崇志,新島 宏文,古賀 達也,山根 大輔,小西 敏文,佐布 晃昭,飯田 慎一,伊藤 浩之,石原 昇,町田 克之,益 一哉","Au単一錘平行平板型3軸MEMS加速度センサの検討","第35回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）",,,,,,2018,Oct.
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone.","Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever","IUMRS-ICA 2018","IUMRS-ICA 2018",,,,,2018,Oct.
"Keisuke Asano,Hao-chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Tso-Fu Mark Chang,Hao-chun Tang,Kyotaro Nitta,Chun-Yi Chen,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electrodeposition of High Strength Au-Cu Alloys for MEMS Device","2018 International Conference on Solid State Devices and Materials (SSDM2018)","2018 International Conference on Solid State Devices and Materials (SSDM2018)",,,,,2018,Sept.
"Masato Sone,Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu","EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"","8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"",,,,,2018,Sept.
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyotaro Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"中島 英亮,Tso-Fu Mark Chang,Chun-Yi Chen,山根 大輔,小西 敏文,町田 克之,年吉 洋,益 一哉,曽根 正人","MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討","第79回応用物理学会秋季学術講演会","第79回応用物理学会秋季学術講演会",,,,,2018,Sept.
"Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Daisuke Yamane,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu","High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology","Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development",,,,,,2018,Sept.
"Hitomi Watanabe,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Takahiro Yamamoto,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshib,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Hideaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Ken Hashigata,Hao-chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test","44rd International Conference on Micro & Nano Engineering (MNE2018)","44rd International Conference on Micro & Nano Engineering (MNE2018)",,,,,2018,Sept.
"Kazuya Masu,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake","CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease","4th International Conference on Condensed Matter and Materials Physics",,,,,,2018,Aug.
"HIdeaki Nakajima,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,HIroshi Toshiyoshi,Hiroyuki Ito,Kazuya Masu,Masato Sone","A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Shota Otobe,Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Katsuyuki Machida,Kazuya Masu","Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection","Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018)",,,,,,2018,June
"Masato Sone,Hao-Chun Tang,Chun-yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu","Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Koichiro Tachibana,Chun-Yi Chen,Tso-Fu Mark Chang,Kyoutarou Nitta,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Chun-Yi Chen,Hao-Chun Tang,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Kyotaro Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Hiroyuki Ito,Kazuya Masu,Masato Sone","Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components","The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan","Nano Engineering and Microsystem Technology Conference, Taiwan",,,,,2018,June
"Keisuke Asano,Hao-Chun Tang,Chun-Yi Chen,Takashi Nagoshi,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications",,"Microelectronic Engineering","Elsevier","Vol. 196",,"pp. 20-24",2018,June
"Ken Hashigata,Haochun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","The effect of acid pre-treatment on electroplating of gold on titanium substrate","32nd International Conference on Surface Modification Technologies (SMT32)",,,,,,2018,June
"伊藤浩之,山根大輔,小西敏文,道正志郎,石原昇,町田克之,曽根正人,三宅美博,益一哉","MEMS加速度センサと生体計測への応用","新化学技術推進協会 電子情報技術部会 マイクロナノシステムと材料・加工分科会 講演会",,,,,,2018,May
"Kyoutarou Nitta,Koichiro Tachibana,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices","233rd ECS Meeting","233rd ECS Meeting",,,,,2018,May
"Ken Hashigata,Hao-Chun Tang,Tso-Fu Mark Chang,Chun-Yi Chen,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film","22nd Topical Meeting of the International Society of Electrochemistry",,,,,,2018,Apr.
"Minami Teranishi,Chun-Yi Chen,Tso-Fu Mark Chang,Toshifumi Konishi,Katsuyuki Machida,Daisuke Yamane,Kazuya Masu,Masato Sone","Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices",,"Microelectronic Engineering",,"Vol. 187-188",,"pp. 105-109",2018,Apr.
"Haochun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys","22nd Topical Meeting of the International Society of Electrochemistry","22nd Topical Meeting of the International Society of Electrochemistry",,,,,2018,Apr.
"Daisuke Yamane,Toshifumi Konishi,Teruaki Safu,Shin-ichi Iida,Takuma Suzuki,Chun-Yi Chen,Tso-Fu Mark Chang,Hiroyuki Ito,Shiro Dosho,Noboru Ishihara,Masato Sone,Katsuyuki Machida,Kazuya Masu","Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology","13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)",,,,,"pp. WM-II-f<sub>3</sub>243",2018,Apr.
"新島 宏文,乙部 翔太,高安 基大,山根 大輔,小西 敏文,佐布 晃昭,伊藤 浩之,年吉 洋,町田 克之,益 一哉","高感度MEMS加速度センサのBrownian Noise評価に関する検討","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"小西 敏文,山根 大輔,佐布 晃昭,陳 君怡,Chang Tso-Fu Mark,伊藤 浩之,道正 志郎,石原 昇,曽根 正人,町田 克之,益 一哉,飯田 慎一","積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"伊藤 浩之,山根 大輔,小西 敏文,道正 志郎,石原 昇,町田 克之,曽根 正人,三宅 美博,益 一哉","集積化CMOS-MEMS技術による高感度慣性センサと応用システム","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"新島 宏文,乙部 翔太,高安 基大,山根 大輔,伊藤 浩之,佐布 晃昭,小西 敏文,道正 志郎,飯田 慎一,石原 昇,町田 克之,益 一哉","単一Au錘3軸差動MEMS加速度センサの検討","平成30年電気学会全国大会",,,,,,2018,Mar.
"Ken Hashigata,Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Noboru Ishihara,Kazuya Masu","A high-resolution capacitive-sensor interface based on a relaxation oscillator","IEICE General Conference 2018",,,,,,2018,Mar.
"伊藤 浩之,?根 ?輔,小西敏文,道正 志郎,?原 昇,町? 克之,曽根 正?,三宅 美博,益 ?哉","集積化CMOS-MEMS技術による?感度慣性センサと応?システム","応用物理学会第65回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"Hao-Chun Tang,Ken Hashigata,Tso-Fu Mark Chang,Chun-Yi Chen,Takashi Nagoshi,Toshifumi Konishi,Daisuke Yamane,Katsuyuki Machida,Kazuya Masu,Masato Sone","Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide",,"Surface and Coatings Technology","Elsevier","Vol. 350",,"pp. 1065-1070",2018,Mar.
"TangHao-Chun,Chun-Yi Chen,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","電解めっき法によるMEMS??銅合?の作製及び機械的特性評価","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"中島英亮,Chun-Yi Chen,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,年吉洋,益 ?哉,曽根 正?","電解めっき法によるTi/Au微?カンチレバーのヤング率評価","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"新? 京太朗,橘 航?朗,TangHao-Chun,Chun-Yi Chen,Tso-Fu Mark Chang,?根 ?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","?期振動試験によるAu-Cu合?微?カンチレバーの構造安定性","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"浅野 啓介,TangHao-Chun,Chun-Yi Chen,名越 貴志,Tso-Fu Mark Chang,?根?輔,小西敏文,町? 克之,益 ?哉,曽根 正?","電析制御による微??カンチレバーの曲げ特性の改善","応用物理学会第６５回春季講演会","応用物理学会第65回春季講演会",,,,,2018,Mar.
"高安 基大,古賀 達也,辻 一平,伊藤 浩之,山根 大輔,道正 志郎,小西 敏文,飯田 慎一,石原 昇,町田 克之,益 一哉","傾斜を用いた1mG MEMS加速度センサの分解能評価の検討","平成30年 電気学会 全国大会",,,,,,2018,Mar.
"宮内 楓,田口 泰地,石川 洋介,伊藤 浩之,道正 志郎,益 一哉,石原 昇","RFバックスキャッタリングによる低電力ワイヤレスセンサ端末モジュールの試作評価結果","2018年 電子情報通信学会総合大会",,,,,,2018,Mar.
"ヨ ジヨン,伊藤浩之,石原 昇,道正志郎,益 一哉","音波・電波ハイブリッドによる測距技術の基礎検討","集積回路研究会","信学技報",,"Vol. 117","no. 462","p. 57",2018,Mar.
"古賀 達也,高安 基大,山根 大輔,伊藤 浩之,小西 敏文,道正 志郎,石原 昇,町田 克之,益 一哉","積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"町田 克之,益一哉","集積化CMOS-MEMS技術の課題と展望","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"益一哉","応物と集積化MEMS技術研究会","第64回応用物理学会春季学術講演会",,,,,,2018,Mar.
"Cheng-Yao Lo,Kazuya Masu,Daisuke Yamane","Development of a Highly-sensitive Flexible Tactile Sensor for Assistance Robots",,,,,,,2018,Mar.
"Hao-Chun Tang,Chun-Yi Chen,Tso-Fu Mark Chang,Takashi Nagoshi,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Kazuya Masu,Masato Sone","Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices",,"Journal of The Electrochemical Society",,"Vol. 165","No. 2","pp. D58-D63",2018,Jan.
"Motohiro Takayasu,Shiro Dosho,Hiroyuki Ito,Daisuke Yamane,Toshifumi Konishi,Katsuyuki Machida,Noboru Ishihara,Kazuya Masu","A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers",,"IEICE Electronics Express",,"Vol. 15","no. 2","p. 20171227",2018,Jan.