"Tomoya Aota,Akihiro Hayasaka,isao makabe,Shigeki Yoshida,Takahiro Gotow,YASUYUKI MIYAMOTO","Wet Etching for Isolation of N-polar GaN HEMT Structure by Electrodeless Photo-Assisted Electrochemical Reaction","33rd International Microprocesses and Nanotechnology Conference (MNC 2020)",,,,,,2020,Nov. "Β“c ’q–η,‘β –Ύ‘Χ,αΑ•Η —E•v,‹g“c ¬‹P,Œγ“‘ ‚Š°,‹{–{ ‹±K","N‹Ι«GaN HEMT\‘’‚Ε‚Μ–³“d‹ΙPECƒGƒbƒ`ƒ“ƒO","‘ζ81‰ρ ‰ž—p•¨—Šw‰οH‹GŠwpu‰‰‰ο",,,,,,2020,Sept.