"Yuki Taoka,Kohei Kawabata,Pasomphone Hemthavy,Seungman Choi,Kunio Takahashi,Shigeki Saito","Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography",,"International Journal of Automation Technology",,"Vol. 16","No. 4","pp. 471-477",2022,July
"Yuki Taoka,Terumichi Hayashi,Pasomphone Hemthavy,Kunio Takahashi,Shigeki Saito","Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling",,"Engineering Research Express","IOP Publishing","Volume 4","Number 1",,2022,Jan.