"Taro Omura,Chun-Yi Chen,Tomoyuki Kurioka,Tso-Fu Mark Chang,Akira Onishi,Parthojit Chakraborty,Katsuyuki Machida,Hiroyuki Ito,Yoshihiro Miyake,Masato Sone","Warpage Characteristics of Gold Proof Mass in MEMS Capacitive Accelerometer","48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)",,,,,,2022,Sept. "?村 太郎,Chun-Yi Chen,Tso-Fu Chang,?根 ?輔,伊藤浩之,町?克之,三宅美博,曽根正?","?めっき材料における機械的特性の電流密度依存性","2022年応?物理学会春季講演会",,,,,,2022,Mar. "Taro Omura,Chun-Yi Chen,Tso-Fu Mark Chang,Daisuke Yamane,Hiroyuki Ito,Katsuyuki Machida,Kazuya Masu,Masato Sone","Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression",,"Surface & Coatings Technology","Elsevier","Vol. 436",,"p. 128315",2022,Feb.