"Hiroshi Funakubo,Akinori Tateyama,Yuichiro Orino,Yoshiharu Ito,Takahisa Shiraishi,Takao Shimizu,Minoru Kurosawa","Characterization of Piezoelectric (K, Na)NbO3 Films for MEMS Applications","ISAF 2023 (IEEE International Symposium on Applications of Ferroelectrics)",,,,,,2023,June "Akinori Tateyama,Yuichiro Orino,Yoshiharu Ito,Takahisa Shiraishi,Takao Shimizu,Minoru Kurosawa,Hiroshi Funakubo","Simultaneous high frequency measurement of both direct and inverse transverse piezoelectric coefficients of thin films using longitudinal vibration",,"Sensors and Actuators A: Physical",,"Vol. 354",," 114265",2023,Feb.