"Kisuke Miyado,Devi Srujana  Tenneti,Akira Onishi,Katsuyuki Machida,Tomoyuki Kurioka,Tso-Fu Mark Chang,Masato Sone,Yoshihiro Miyake,Hiroyuki Ito","Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology",,"Japanese Journal of Applied Physics",,"Vol. 63","No. 4","p. 04SP23",2024,Feb.