@article{CTT100909820, author = {Noboru Yamaguchi and Ralph Müller and Christian Reichel b and Jan Benick and Shinsuke Miyajima}, title = {Plasma immersion ion implantation for tunnel oxide passivated contact in silicon solar cell}, journal = {Solar Energy Materials and Solar Cells}, year = 2024, } @article{CTT100887722, author = {Noboru Yamaguchi and Shasha Li and Shinsuke Miyajima}, title = {Characterization of tunnel oxide passivated contact fabricated by sputtering and ion implantation technique}, journal = {Japanese Journal of Applied Physics}, year = 2023, } @inproceedings{CTT100928926, author = {Shasha Li and Koki Omori and Yasushi Kawaguchi and Noboru Yamaguchi and Shinsuke Miyajima}, title = {(Tu2-P31-14) High-Quality Tunnel Oxide Passivated Contact Fabricated Using Sputtered Amorphous Silicon and Spin-On Doping}, booktitle = {}, year = 2024, } @inproceedings{CTT100925588, author = {山口 昇 and Li Shasha and 宮島 晋介}, title = {[25a-P05-4] スパッタおよびイオン注入を用いた高品質(τeff > 10 ms) TOPCon構造の作製}, booktitle = {}, year = 2024, } @inproceedings{CTT100906075, author = {Noboru Yamaguchi and Ralph Müller and Christian Reichel and Jan Benick and Shinsuke Miyajima}, title = {(Area5 5TuO7-5) Application of plasma immersion ion implantation technics to TOPCon solar cells}, booktitle = {}, year = 2023, } @inproceedings{CTT100883869, author = {Noboru Yamaguchi and Shinsuke Miyajima}, title = {Evaluation of passivation layer for TOPCon formed by sputtering and ion implantation (WeO-31g-07])}, booktitle = {}, year = 2022, } @inproceedings{CTT100883871, author = {山口 昇 and 宮島 晋介}, title = {スパッタ法およびイオン注入法にて形成したTOPCon構造の評価(20p-C101-6)}, booktitle = {}, year = 2022, } @misc{CTT100929687, author = {Noboru Yamaguchi}, title = {Passivating contacts for high efficiency silicon solar cells fabricated by using ion implantation and sputtered amorphous silicon}, year = , } @misc{CTT100929689, author = {Noboru Yamaguchi}, title = {Passivating contacts for high efficiency silicon solar cells fabricated by using ion implantation and sputtered amorphous silicon}, year = , } @misc{CTT100929693, author = {Noboru Yamaguchi}, title = {Passivating contacts for high efficiency silicon solar cells fabricated by using ion implantation and sputtered amorphous silicon}, year = , } @phdthesis{CTT100929687, author = {Noboru Yamaguchi}, title = {Passivating contacts for high efficiency silicon solar cells fabricated by using ion implantation and sputtered amorphous silicon}, school = {東京工業大学}, year = , } @phdthesis{CTT100929689, author = {Noboru Yamaguchi}, title = {Passivating contacts for high efficiency silicon solar cells fabricated by using ion implantation and sputtered amorphous silicon}, school = {東京工業大学}, year = , } @phdthesis{CTT100929693, author = {Noboru Yamaguchi}, title = {Passivating contacts for high efficiency silicon solar cells fabricated by using ion implantation and sputtered amorphous silicon}, school = {東京工業大学}, year = , }