@inproceedings{CTT100622339,
  author = {H. Kozako and J. Sakurai and N. Mukai and Y. Ohnuma and T. Takahashi and S. Hata},
  title = {Corrosion resistance consolidation of a diaphragm type vacuum sensor},
  booktitle = {The 25th IEEE Int. Conf. MEMS 2011},
  year = 2011,
}

@inproceedings{CTT100622338,
  author = {小迫 景嗣 and 櫻井淳平 and 秦誠一 and 向井伸幸 and 大沼 恵則 and 高橋 勉},
  title = {薄膜金属ガラスを用いた新しいダイアフラム形真空センサ},
  booktitle = {第2回マイクロ・ナノ加工シンポジウム},
  year = 2010,
}

@inproceedings{CTT100608137,
  author = {Seiichi Hata and Junpei Sakurai and Hiroshi Kozako and Yukiko Matsumoto and Akira Shimokohbe and Nobuyuki Mukai and Yoshinori Ohnuma and Tsutomu Takahashi and Yasunori Saotome and Hisamichi Kimura and Parmanand Sharma and Akihisa Inoue},
  title = {DEVELOPMENT OF HIGH-PERFORMANCE VACUUM SENSOR USING JOINING METHOD FOR THIN FILM METALLIC GLASS},
  booktitle = {The Third International Conference on the Characterization and Control of Interfaces for High Quality Advanced Materials, and Joining Technology for New Metallic Glasses and Inorganic Materials},
  year = 2009,
}