@inproceedings{CTT100928871,
  author = {Haoyu Chen and Eissa Moataz and Kaibin Yao and Tsuyoshi Horikawa and Nobuhiko Nishiyama},
  title = {Design of Layer-to-Layer Coupler between Si and SiON Waveguides using Low Index (~1.6) SiON},
  booktitle = {},
  year = 2025,
}